Taiwan Semiconductor Manufacturing Comp. Ltd.

Meng-Chen Lin

Jiun-Rong Pai

Hsu-Shui Liu

Shou-Wen Kuo

Hsuan Lee

Chien-Fa Lee

Jian-Hung Chen

Chung-Hsin Chien

Boris Huang

A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.

System and method for ring frame cleaning and inspection

Growing community of inventors

Hsinchu, Taiwan

Meng-Chen Lin