Oramir Semiconductor Equipment Ltd.

Other

Menachem Genut

Ofer Tehar-Zahav

Eliezer Iskevitch

Boris Buyaner Livshits

Boris Livshits (Buyaner)

Boris Livshit (Buyaner)

A method of fast and complete laser removal of inorganic and organic foreign material, including particles down to submicron-sizes and atomic contaminants, such as heavy metals and alkaline elements, from a substrate without any damage to the substrate, carried out by UV laser irradiation of the substrate surface in a reactive oxygen based gas, which comprises carrying out the removal process in the presence of gas containing F and/or Cl atoms in its molecules.

Laser removal of foreign materials from surfaces

A method and apparatus for accelerating a laser stripping process carried out in a reactive gas mixture, comprising carrying out the stripping process in the presence of an accelerating effective amount of N O gas.

Laser stripping improvement by modified gas composition

A process and apparatus for carrying out the removal of a coating substance from the sidewalls of a surface to be stripped comprising, providing a laser beam incidence on the surface at an incidence angle &agr; relative to the plane of the surface being treated, wherein the angle &agr;>0, and periodically switching or gradually changing the azimuth of the beam incidence plane.

Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls

Laser processing chamber with cassette cell

Growing community of inventors

Haifa, Israel

Menachem Genut