Freescale Semiconductor,inc.

Melissa O Zavala

Bich-Yen Nguyen

Mariam G Sadaka

Voon-Yew Thean

Ted R White

Victor H Vartanian

Brian J Goolsby

Linda B McCormick

Colita M Parker

Kimberly Gay Reid

James Kenyon Schaeffer, Iii

Gregory S Spencer

Marc A Rossow

Daniel Thanh-Khac Pham

Joe Mogab

Sherry G Straub

Debby Eades

James P Geren

An electronic device can include a first semiconductor portion and a second semiconductor portion, wherein the compositions of the first and second semiconductor portions are different from each other. In one embodiment, the first and second semiconductor portions can have different stresses compared to each other. In one embodiment, the electronic device may be formed by forming an oxidation mask over the first semiconductor portion. A second semiconductor layer can be formed over the second semiconductor portion of the first semiconductor layer and have a different composition compared to the first semiconductor layer. An oxidation can be performed, and a concentration of a semiconductor element (e.g., germanium) within the second portion of the first semiconductor layer can be increased. In another embodiment, a selective condensation may be performed, and a field isolation region can be formed between the first and second portions of the first semiconductor layer.

Electronic devices including a semiconductor layer

A semiconductor process and apparatus provide a high performance CMOS devices () with hybrid or dual substrates by etching a deposited oxide layer () using inverse slope isolation techniques to form tapered isolation regions () and expose underlying semiconductor layers () in a bulk wafer structure prior to epitaxially growing the first and second substrates () having different surface orientations that may be planarized with a single CMP process. By forming first gate electrodes () over a first substrate () that is formed by epitaxially growing (100) silicon and forming second gate electrodes () over a second substrate () that is formed by epitaxially growing (110) silicon, a high performance CMOS device is obtained which includes high-k metal PMOS gate electrodes having improved hole mobility.

Inverse slope isolation and dual surface orientation integration

Electronic devices including a semiconductor layer and a process for forming the same

A method for providing gates of transistors with at least two different work functions utilizes a silicidation of two different metals at different times, silicidation for one gate and polysilicon for the other, or silicidation using a single metal with two differently doped silicon structures. Thus the problem associated with performing silicidation of two different metals at the same time is avoided. If the two metals have significantly different silicidation temperatures, the one with the lower temperature silicidation will likely have significantly degraded performance as a result of having to also experience the higher temperature required to achieve silicidation with the other metal.

Method for forming a semiconductor device structure a semiconductor layer

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Pflugerville, TX, United States of America

Melissa O Zavala