Cheil Industries Inc.

Enki Technology, Inc.

First Solar, Inc.

Meisam Movassat

Brenor L Brophy

Sina Maghsoodi

Shahrokh Motallebi

Thomas E Colson

Peter R Gonsalves

Ze'ev R Abrams

Aravamuthan Varadarajan

SangHak Lim

Do-Hyeon Kim

Disclosed herein are polysilsesquioxane based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In embodiments, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with &#x3e;40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in the polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, Si&#x2014;OH condensation catalyst and/or nanofillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes including flow coating and roll coating, and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

Optical enhancing durable anti-reflective coating

A composition includes a boron-containing hydrogen silsesquioxane polymer having a structure that includes: silicon-oxygen-silicon units, and oxygen-boron-oxygen linkages in which the boron is trivalent, wherein two silicon-oxygen-silicon units are covalently bound by an oxygen-boron-oxygen linkage therebetween.

Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods

Growing community of inventors

Atherton, CA, United States of America

Meisam Movassat