Pdf Solutions, Incorporated

Meindert Martin Lunenborg

Yuan Yu

Tomasz Brozek

Sharad Saxena

Mike Kyu Hyon Pak

Christopher Hess

Rakesh Vallishayee

Amit Joag

Hendrik Schneider

SiewHoon Ng

Thomas Brozek

Described are test structures and methods for measuring silicon thickness in fully depleted silicon-on-insulator technologies.

Test structures for measuring silicon thickness in fully depleted silicon-on-insulator technologies

An apparatus and method for testing two-terminal memory elements organized as a cross-point memory array. The apparatus allows functional testing of two-terminal memory elements organized as a cross-point memory array, and built in a short flow manufacturing process. The proposed apparatus substantially eliminates the use of any type of additional active or passive switches, selectors, or decoders. A large number of memory elements of various memory types including planar (two dimensional) or three dimensional memory structures can be tested without the need of manufacturing selectors or running the full flow process.

Passive array test structure for cross-point memory characterization

Test structures and methods for measuring silicon thickness in fully depleted silicon-on-insulator technologies

Growing community of inventors

St Gely du Fesc, France

Meindert Martin Lunenborg