United Microelectronics Corp.

Mei-Ling Chao

Tien-Hao Tang

Kuan-Cheng Su

Hou-Jen Chiu

Chien-Ting Lin

Chang-Tzu Wang

Shiao-Shien Chen

Lu-An Chen

Kun-Chih Wang

Bing-Chang Wu

Li-Cih Wang

Tai-Hsiang Lai

Yi-Chun Chen

Ya-Ting Lin

Chia-Yun Chen

Kuei-Chih Fan

Heng-Yu Lin

Kuan-Yu Lu

Chih-Hsiang Chang

An electrostatic discharge (ESD) protection device includes a semiconductor substrate, a gate structure, a source doped region, a drain doped region, source silicide patterns, and drain silicide patterns. The gate structure is disposed on the semiconductor substrate. The source doped region and the drain doped region are disposed in the semiconductor substrate and located at two opposite sides of the gate structure in a first direction, respectively. The source silicide patterns are disposed on the source doped region. The source silicide patterns are arranged in a second direction and separated from one another. The drain silicide patterns are disposed on the drain doped region. The drain silicide patterns are arranged in the second direction and separated from one another. The source silicide patterns and the drain silicide patterns are arranged misaligned with one another in the first direction.

Electrostatic discharge protection device including source silicide pattern and drain silicide pattern

An electrostatic discharge protection structure includes a semiconductor substrate, a gate structure disposed on the semiconductor substrate, a first well region of a first conductivity type disposed in the semiconductor substrate, a first doped region of the first conductivity type, a second doped region of a second conductivity type, a third doped region of the first conductivity type, and a fourth doped region of the second conductivity type. The first and second doped regions are disposed in the first well region and connected with each other. The second doped region is an emitter of a first bipolar junction transistor. The third and fourth doped regions are disposed in the semiconductor substrate and connected with each other. The third and second doped regions are located at two opposite sides of the gate structure in a first horizontal direction. The third doped region is an emitter of a second bipolar junction transistor.

Electrostatic discharge protection structure

A grounded gate NMOS transistor includes a P-type substrate, P-well region in the P-type substrate, and a gate finger traversing the P-well region. The gate finger has a first spacer on a first sidewall and a second spacer on a second sidewall opposite to the first sidewall. An Ndrain doping region is disposed in the P-type substrate and is adjacent to the first sidewall of the gate finger. The Ndrain doping region is contiguous with a bottom edge of the first spacer. An Nsource doping region is disposed in the P-type substrate opposite to the Ndrain doping region. The Nsource doping region is kept a predetermined distance from a bottom edge of the second spacer. A Ppick-up ring is disposed in the P-well region and surrounds the gate finger, the Ndrain doping region, and the Nsource doping region.

Grounded gate NMOS transistor having source pulled back region

An ESD protection device on a substrate includes a base doped region of a first conductivity type. A first inter doped region of a second conductivity type is in the base doped region. A drain region of the second conductivity type in the first inter doped region is connected to a first electrode terminal. An inserted doped region of the first conductivity type is in the drain region. A second inter doped region of the second conductivity type is in the base doped region. A source region of the second conductivity type is in the second inter doped region. A substrate-surface doped region of the first conductivity type in the substrate is adjacent to or in contact with the source region. A gate structure is between the drain and source regions in the substrate. The substrate-surface doped region and the source region are connected to a second electrode terminal.

Electrostatic discharge protection device

A layout structure of an ESD protection semiconductor device includes a substrate, a first doped region, a pair of second doped regions, a pair of third doped regions, at least a first gate structure formed within the first doped region, and a drain region and a first source region formed at two sides of the first gate structure. The substrate, the first doped region and the third doped regions include a first conductivity type. The second doped regions, the drain region and the first source region include a second conductivity type complementary to the first conductivity type. The first doped region includes a pair of lateral portions and a pair of vertical portions. The pair of second doped regions is formed under the pair of lateral portions, and the pair of third doped regions is formed under the pair of vertical portions.

Electrostatic discharge protection semiconductor device and layout structure of ESD protection semiconductor device

A semiconductor device comprises a fin shaped structure, a shallow trench isolation, a diffusion break structure and a gate electrode. The fin shaped structure is disposed on a substrate. The shallow trench isolation is disposed in the substrate and surrounds the fin shaped structure. The diffusion break structure is disposed in the fin shaped structure, and the gate electrode is disposed across the fin shaped structure.

Semiconductor device

An ESD protection device and a method of forming the same, the ESD device includes a substrate, a first doped well, a second doped well, a source and drain regions and a guard ring. The first doped well with a first conductive type is disposed in the substrate. The source and drain regions with the second conductive type are disposed in the first doped well. The guard ring with the first conductive type is also disposed in the first doped well and has a first portion extending along a first direction and a second portion extending along a second direction different from the first direction. The second doped well with the second conductive type is also disposed in the first doped well between the drain region and the second portion of the guard ring to in contact with the drain region in the first direction.

Semiconductor device for electrostatic discharge protection and method of forming the same

A semiconductor structure comprises a well, a first lightly doped region, a second lightly doped region, a first heavily doped region, a second heavily doped region and a gate. The first lightly doped region is disposed in the well. The second lightly doped region is disposed in the well and separated from the first lightly doped region. The first heavily doped region is disposed in the first lightly doped region. The second heavily doped region is partially disposed in the second lightly doped region. The second heavily doped region has a surface contacting the well. The gate is disposed on the well between the first heavily doped region and the second heavily doped region. The well has a first doping type. The first lightly doped region, the second lightly doped region, the first heavily doped region and the second heavily doped region have a second doping type.

Semiconductor structure

An electrostatic discharge protection device includes an anode, a cathode, a negative voltage holding transistor and a positive voltage holding transistor. The anode is coupled to an input terminal, and the cathode is coupled to a ground. The negative voltage holding transistor includes an N-well. The positive voltage holding transistor includes an N-well. The N-well of the positive voltage holding transistor and the N-well of the negative voltage holding transistor are coupled together and are float. The negative voltage holding transistor and the positive voltage holding transistor are coupled between the anode and the cathode in a manner of back-to-back.

Electrostatic discharge protection device and method for producing an electrostatic discharge protection device

The present invention provides electrostatic discharge protectors. One aspect of the present invention provides an electrostatic discharge protector includes a substrate, an electrostatic discharge protection circuit disposed on the substrate, and a pickup ring surrounding the electrostatic discharge protection circuit. The pickup ring has a plurality of low resistance zones where a doping layer, a contact and a metal layer are connected in sequence, and the low resistance zones are distributed within the pickup ring separately and unequally.

Electrostatic discharge protector

A method for fabricating a semiconductor device is provided. A fin of a first conductivity type is formed on a substrate of the first conductivity type. A gate is formed on the substrate, wherein the gate covers a portion of the fin. Source and drain regions of a second conductivity type are formed in the fin at respective sides of the gate. A punch-through stopper (PTS) of the first conductivity type is formed in the fin underlying the gate and between the source and drain regions, wherein the PTS has an impurity concentration higher than that of the substrate. A first impurity of the second conductivity type is implanted into the PTS, so as to compensate the impurity concentration of the PTS.

Method for fabricating semiconductor device

An electrostatic discharge (ESD) includes a semiconductor substrate having the first conductive type, a well having the first conductive type, a buried layer having the second conductive type and a well having the second conductive type. The buried layer having a second conductive type is disposed in the semiconductor substrate under the well having the first conductive type. The well having the second conductive type disposed to divide the well having the first conductive type into a first well and a second well. The well having the second conductive type contacts the buried layer, and the well having the second conductive type and the buried layer are jointly used to isolate the first well from the second well.

A semiconductor device and a fabricating method thereof are provided. The semiconductor device includes a substrate of a first conductivity type, a fin, a gate, source and drain regions of a second conductivity type, and a first doped region of the second conductivity type. A plurality of isolation structures is formed on the substrate. The fin is disposed on the substrate between two adjacent isolation structures. The gate is disposed on the isolation structures and covers a portion of the fin, wherein the portion of the fin covered by the gate is of the first conductivity type. The source and drain regions is configured in the fin at respective sides of the gate. The first doped region is configured in the fin underlying the source and drain regions and adjoining the substrate. The first doped region has an impurity concentration lower than that of the source and drain regions.

Semiconductor device having ESD device

A LDNMOS device for an ESD protection circuit including a P-type substrate and an N-type deep well region is provided. The P-type substrate includes a first area and a second area. The N-type deep well region is in the first and second areas of the P-type substrate. The LDNMOS device further includes a gate electrode disposed on the P-type substrate between the first and second areas, a P-type implanted region disposed in the first area of the P-type substrate, an N-type grade region disposed in the N-type deep well region of the first area, an N-type first doped region disposed in the N-type grade region, a P-type body region disposed in the N-type deep well region of the second area, an N-type second doped region disposed in the P-type body region, and a P-type doped region disposed in the P-type body region and adjacent to the N-type second doped region.

Device for ESD protection circuit

A semiconductor chip capable of implementing wire bonding over active circuits (BOAC) is provided. The semiconductor chip includes a bonding pad structure which includes a bondable metal pad, a top interconnection metal layer, a stress-buffering dielectric, and at least a first via plug between the bondable metal pad and the top interconnection metal layer. The semiconductor chip also includes at least an interconnection metal layer, at least a second via plug between the interconnection metal layer and the bonding pad structure, and an active circuit situated underneath the bonding pad structure on a semiconductor substrate.

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Hsinchu, Taiwan

Mei-Ling Chao