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Fluicell Ab

Mehrnaz Shaali

Aldo Jesorka

Alar Ainla

Irep Gözen

Here we disclose a lithographic pattern development process for amorphous fluoropolymers. Amorphous fluoropolymers are a class of plastic materials with high chemical inertness and favorable optical properties. Exposure of surface-deposited layers of such polymer with high energy radiation leads to a change in the chemical structure of the polymer, which selectively compromises the solubility of the exposed areas in fluorinated organic solvents. Micro- and nanopatterning with a feature size down to &#x3c;50 nm was achieved by dissolving and removing unexposed amorphous fluoropolymer from exposed, surface deposited films. The amorphous fluoropolymer functions thus as a negative resist.

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Gothenburg, Sweden

Mehrnaz Shaali