Ebara Corporation

Megumi Uno

Chikako Takatoh

Yumiko Nakamura

Akira Fukunaga

Masahito Abe

Shohei Shima

Toshiya Kon

A cleaning apparatus for cleaning member has a member cleaning partthat cleans a cleaning memberthat cleans a substrate W; and a measurement partthat measures a degree of cleanliness of the cleaning membercleaned by the member cleaning part

Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method

A cleaning apparatus performing cleaning treatment for a washing tool used for substrate washing by causing the washing tool to contact with a cleaning member while supplying a washing liquid to the washing tool includes a liquid extraction unit that extracts the washing liquid remaining in the washing tool or the washing liquid flowing out from the washing tool in the cleaning treatment, a color reaction unit that applies an iodine color reaction to the washing liquid extracted by the liquid extraction unit, and a determination unit that detects a coloration degree of the washing liquid subjected to the iodine color reaction and determines whether or not cleaning of the washing tool is completed based on the detected coloration degree.

Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool

In a method for determining cleanliness of a cleaning member that contacts a substrate and with which scrub cleaning is performed, the method includes a first step of self-cleaning a cleaning member by releasing contaminants from the cleaning member into a cleaning liquid, and a second step of bringing a self-cleaning discharged liquid into contact with an electrode of a crystal oscillator, attaching the contaminants contained in the discharged liquid onto the electrode of the crystal oscillator, then measuring a frequency response of the crystal oscillator in which the contaminants are attached onto the electrode, and determining cleanliness of the cleaning member based on the measured frequency response.

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Tokyo, Japan

Megumi Uno