Canon Anelva Corporation

Anelva Corporation

Megumi Nakamura

Yoshiro Shiokawa

Toshihiro Fujii

Harumi Maruyama

Yoshiki Hirano

Tohru Sasaki

Qiang Peng

Yasuyuki Taneda

Yoshiyuki Takizawa

Masayuki Sugiyama

Yuji Shimada

Hiroki Mita

Lei Chen

Aiko Wada

A mass spectrometer includes: an ionization unit configured to ionize an analyte gas; a filter unit configured to allow passage of only a target ion which is a component of the analyte gas ionized in the ionization unit and which has a specific mass-to-charge ratio; and an ion detection unit configured to detect an ion detection value based on the target ion having passed through the filter unit, wherein the ion detection unit includes a Faraday electrode which includes an electrode portion disposed along a centerline of the filter unit and a bottom electrode provided at a position downstream of the electrode portion in a flow of the target ion, the electrode portion and the bottom electrode being connected to each other, a secondary electron multiplier provided to face the electrode portion with the centerline located therebetween, and a blocking portion connected to the bottom electrode.

Mass spectrometer

An object of the present invention is to provide a mass spectrometer having a simple structure and being capable of precisely measuring a total pressure and performing mass spectrometry with high precision. A mass spectrometer according to one embodiment includes a quadrupole configured to selectively pass therethrough an ion of a target gas having a predetermined mass-to-charge ratio among components of a measurement gas ionized by an ion source, an ion detector configured to detect an ion current value based on the ion of the target gas that passes through the quadrupole, a total pressure measurer configured to detect a photoelectric current value based on vacuum ultraviolet light generated when the ion source ionizes the measurement gas, and an arithmetic unit configured to calculate a partial pressure of the target gas by using the photoelectric current value and the ion current value.

The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector () for detecting the number of first charged particles being charged particles having a first flight distance Lthat is a flight distance of zero or more from the ion source, and a collector () for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.

Device for measuring mean free path, vacuum gauge, and method for measuring mean free path

The present disclosure provides an ion detector for improving the effect of electric field for pulling in an ion to be detected to a first-stage electrode of a secondary electron multiplier (SEM), and improving the effect of a stray light reduction. In one example embodiment, an ion detector includes a SEM, and a lead-in electrode for pulling in an ion to a first-stage electrode side of the SEM. At least one of the area of the lead-in electrode and a potential difference between the lead-in electrode and neighboring electrodes of the lead-in electrode, the neighboring electrode being an electrode not of the SEM, is set so that the light amount of internal-stray light generated inside the detector entering the first-stage electrode is not more than that of external-stray light generated outside the detector entering the first-stage electrode, when an ion is introduced into the detector.

Ion detector for mass spectrometry, method for detecting ion, and method for manufacturing ion detector

A mass spectrometer includes an ionization chamber () which generates fragment-free ions to be detected from an introduced gas to be detected, and a mass spectrometer chamber () including a mass spectrometer () which fractionates by mass the ions to be detected that are transported from the ionization chamber and which detects the ions. The mass spectrometer further includes a probe () which holds a liquid sample or a solid sample and causes the liquid sample or the solid sample to generate the gas to be detected upon heating by a heating means, and a gas introduction means () which introduces a predetermined gas from the probe to the ionization chamber to transport, to the ionization chamber, the gas to be detected that is generated at the probe.

Mass spectrometer and mass spectrometry method

The present invention maintains a stable emission amount from an emitter. In an embodiment of the present invention, a solid sample or a liquid sample is heated to gasify an object to be measured contained in the solid sample or the liquid sample, thereby forming a neutral gaseous molecule, and a metal ion emitted from an emitter having an oxidized surface is attached to the neutral gaseous molecule to ionize the neutral gaseous molecule, which is subjected to mass spectrometry. The solid sample or the liquid sample is a sample that emits a reducing gas by heating. The heating for gasifying the object to be measured is performed at a temperature lower than the vaporization temperature of the solid sample or the liquid sample and not less than the vaporization temperature of the object to be measured, and an oxidizing gas is provided to the emitter.

Mass spectrometry and mass spectrometer used for the same

An internal standard material to be added to a specimen containing a material to be measured when measuring the content of the material to be measured by performing mass spectrometry on the specimen includes a hindered phenol compound.

Internal standard material, resin composition, and measurement method

A mass spectrometer system comprises a chamber having an ion emitting unit to emit metal ions in the chamber with a communicating hole; a neutral molecule introduction unit; another gas introduction unit; a controller controlling a temperature of a region where metal ions attach to the neutral molecules; and a mass analyzer for the neutral molecules with the metal ions, wherein plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, the controller adjusts the temperature of the region so as to fall within a range obtained by excluding a range corresponding to the temperature of the region from 150 to 200&#xb0; C. from a range surrounded by the temperatures of the region [&#xb0; C.]=150&#xd7;attachment energy [eV], 100&#xd7;attachment energy [eV]&#x2212;50, and 20&#xb0; C., and attachment energies [eV]=2.1 and 0.5.

Mass spectrometer system and mass spectrometry method

A mass spectrometer includes an ionization chamber, a temperature control unit which controls the temperature in the ionization chamber to vaporize a sample in at least one of solid and liquid state in the ionization chamber, an introduction unit which introduces the sample into the ionization chamber, an ion supply unit which supplies ions to the ionization chamber to ionize, in the ionization chamber, the sample vaporized in the ionization chamber, and a mass analyzer which measures the mass of the molecules of the ionized sample.

An ion attachment mass spectrometry apparatus causing positively charged metal ions to attach to molecules of a gas to be measured in an attachment region to generate attached ions and then performing mass spectrometry on the attached ions by a mass spectrometer, has a metal ion selective disassociation unit for selectively making the metal ions attached to the specific molecules in the attachment region disassociate. By making the metal ions attached to the specific molecules such as HO disassociate, a state is formed where the metal ions are attached to only the sample gas to be measured and the reliability of measurement of the gas is improved.

Ion attachment mass spectrometry apparatus

An apparatus for ion attachment mass spectrometry provided with an ion emitter for emitting positively charged metal ions, an ionization chamber for causing attachment of the metal ions to a gas to be detected, a third component gas introduction mechanism for introducing a third component gas into the ionization chamber, and a mass spectrometer for mass separation and detection of the detected gas with the metal ions attached. The third component gas introduction mechanism is provided with three types of third component gases and selectively introduces one type of third component gas from the three types of third component gases. Due to this, the occurrence of interference peaks due to macromers of third component gases with each other, macromers of third component gases and high concentration ingredients, etc. is prevented and accurate mass analysis made possible.

Method and apparatus for ion attachment mass spectrometry

An ionization apparatus according to the present invention has a mechanism for causing metal ions emitted from an ion emitter to attach to an introduced target gas so as to generate ions of the sample gas and emits the ions of the sample gas to a mass spectrometer. The mass spectrometer has a zone in which one or both of an electric field and magnetic field are formed. As the electrode for causing the generation of cleaning plasma in the ionization zone generating the ions of the sample gas, the ion emitter is used. The ion emitter causes the generation of plasma in connection with a hollow vessel and removes deposits on components facing the ionization zone by the plasma. The plasma cleaning process is performed consecutively at a suitable timing after the ionization process. Due to the above configuration, deteriorated performance in ionization can be restored in a short time, a memory effect can be prevented, and accurate mass spectrometry becomes possible. The ionization apparatus of the present invention is suitable for a mass spectrometry apparatus.

Ionization apparatus

An apparatus for ion attachment mass spectrometry provided with a reaction chamber for causing positively charged metal ions to attach to a gas to be detected; a mass spectrometer for mass separation and detection of the detection gas; an analysis chamber in which the mass spectrometer is placed; differential evacuation chambers for connecting the reaction chamber and analysis chamber; a data processor for receiving and processing the mass signal from the mass spectrometer; and vacuum gauges for measuring the total pressure of the reduced pressure atmosphere of the reduced pressure atmosphere reaction chamber, a differential evacuation chamber, and an analysis chamber. The total pressure signal from the vacuum gauge measured during the measurement is input to one of the data processor, introduction mechanism, and evacuation mechanism. The data processor has a processing means for performing quantitative analysis of each component utilizing the fact that sensitivity of each component has dependency on the total pressure of the reduced pressure atmosphere and that the dependency on total pressure differs for each component.

A mass spectrometry apparatus is provided with a mass spectrometry mechanism for analyzing the mass of ionized detected gas. The mass spectrometry apparatus is further provided with two ion sources, that is, a first ion source for attaching positive charge metal ions to cause ionization, and a second ion source for causing electrons to impact to cause ionization. Based on the configuration, it becomes possible to simultaneously or separately measure the molecular weight and analyze the molecular structure of the detected gas with a high sensitivity. The second ion source is positioned between the first ion source and the mass spectrometry mechanism and the detected gas is introduced into the first ion source. According to the above mass spectrometry apparatus, it is possible to measure the accurate molecular weight of the detected gas with a sufficient sensitivity and to simultaneously analyze the molecular structure with a sufficient sensitivity.

Growing community of inventors

Tama, Japan

Megumi Nakamura