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Sigma-aldrich Co. LLC

Megan Ravetz

Rajesh Odedra

Graham Williams

Andrew R Nelson

Phillip Reeve Jacobs

Roy Trevor Blunt

Howard Williams

A process and apparatus to enable the continuous isolation of an organometallic compound, such as trimethylindium from a liquid feedstock. The liquid feedstock is delivered to a distillation column having two heating zones to effect dissociation of the feed stock thereby liberating the organometallic compound, which is collected as a vapor from the top of the column.

Process and apparatus for the isolation of pure, or substantially pure, organometallic compounds

A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler ( ) to a plurality of reactor sites ( ) wherein a carrier gas ( ) is introduced into the container ( ) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites ( ). The gaseous mixture may be stored in a reservoir ( ) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.

Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites

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Chester, United Kingdom

Megan Ravetz