Applied Materials, Inc.

Nvidia Corporation

Meenaradchagan Vishnu

Shirish C Gadre

Jack H Choquette

Olivier Giroux

Michael Alan Fetterman

Robert Ohannessian

Xiaogang Qiu

Zheng Gu

Diana Valverde-Paniagua

Glen Alan Gomes

Zhongchuan Zhang

Rendong Lin

Embodiments of the systems and methods discussed herein autofocus an imaging apparatus by pre-processing image data received via channels of the imaging system that include laser beams and sensors configured to receive image data when laser beams are applied across a substrate in a pixel-wise application across a substrate. The substrate can include both a photoresist and metallic material, and the images as-received by the sensors include noise from the metallic material. During pre-processing of the image data, a percentage of noise to remove from the image data is determined, and the image data is filtered. A centroid of the substrate is calculated for each channel and a focus deviation for the exposure is determined. The centroids can be combined using one or more filtering mechanisms, and the imaging system can be autofocused in an exposure position by moving the stage and/or the exposure source in one or more directions.

Real-time autofocus for maskless lithography on substrates

A system, method, and computer program product are provided for implementing a software-based scoreboarding mechanism. The method includes the steps of receiving a dependency barrier instruction that includes an immediate value and an identifier corresponding to a first register and, based on a comparison of the immediate value to the value stored in the first register, dispatching a subsequent instruction to at least a first processing unit of two or more processing units.

System, method, and computer program product for implementing software-based scoreboarding

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San Jose, CA, United States of America

Meenaradchagan Vishnu