Varian Semiconductor Equipment Associates, Inc.

Mayur Jagtap

Frank Sinclair

Victor M Benveniste

Bon-Woong Koo

Julian G Blake

Svetlana Radovanov

Craig Richard Chaney

Kenneth Harry Purser

Eric D Hermanson

Richard John Hertel

Wilhelm P Platow

D Jeffrey Lischer

Christopher A Rowland

Alexander C Kontos

James S Buff

Shardul Patel

Eric R Cobb

James Alan Pixley

Steven C Borichevsky

Edward Macintosh

Sankar Ganesh Kolappan

Provided herein are approaches for securing electrostatic elements within a lens component. In one approach, a connector includes a flexible coupling secured at a first end to an electrostatic element of a plurality of electrostatic elements, the plurality of electrostatic elements extending between a set of sidewalls of the lens component. The connector further includes a stub protruding from a feedthrough component provided through the set of sidewalls, the stub secured to the flexible coupling at a second end of the flexible coupling.

Connector for process chamber electrostatic elements

A media carrier, adapted to hold a plurality of pieces of magnetic media, is disclosed. This media carrier can be placed on the workpiece support, or platen, allowing the magnetic media to be processed. In some embodiments, the media carrier is designed such that only one side of the magnetic media is exposed, requiring a robot or other equipment to invert each piece of media in the carrier to process the second side. In other embodiments, the media carrier is designed such that both sides of the magnetic media are exposed. In this scenario, the media carrier is inverted on the platen to allow processing of the second side.

Media carrier

Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.

Techniques for improving extracted ion beam quality using high-transparency electrodes

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Burlington, MA, United States of America

Mayur Jagtap