The University of New Mexico

Sharp Kabushiki Kaisha Corporation

May Nyman

Mark J Hampden-Smith

Klaus Kunze

Seshu B Desu

Pradyot A Agaskar

In a method of depositing a metal sulfide film on a substrate a solution containing at least one metal compound precursor comprising at least one thiocarboxylate ligand SECR, wherein E is selected from the group consisting of O and S and wherein R is selected from the group consisting of alkyl, aryl, substituted alkyl, substituted aryl, halogenated alkyl, and halogenated aryl is prepared. The substrate is heated to a reaction temperature. The solution is evaporated to form vapors of the metal compound precursor. The vapors and the substrate heated to the reaction temperature are contacted. The reaction temperature is sufficient to decompose the metal compound precursor to form a metal sulfide film of at least one metal on the substrate.

Chemical vapor deposition of metal sulfide films from metal

In a method of depositing a metal sulfide film on a substrate, at least one metal compound precursor comprising at least one thiocarboxylate ligand SECR and at least one solubility-improving ligand L is dissolved in a solvent to produce a solution, wherein a) E is selected from the group consisting of O and S and R is selected from the group consisting of alkyl, aryl, substituted alkyl, substituted aryl, halogenated alkyl, and halogenated aryl; and wherein b) L is selected from the group of monodentate ligands, multidentate ligands, and R.sup.1 O ligands. The solution is coated onto a substrate and the substrate is heated to a reaction temperature sufficient to decompose the metal compound precursor to form a metal sulfide film of at least one metal on the substrate.

Method of depositing metal sulfide films from metal thiocarboxylate

A method and apparatus for the synthesis of .beta.-diketonates such as Pb(fod).sub.2 and Pb(thd).sub.2 for use as precursors in metalorganic chemical vapor deposition processes. Lead oxide and a medium of pentane and a protonated ligand (H-fod or H-thd) are combined in a flask and subjected to reaction-promoting ultrasonic waves. The flask is immersed in a water bath to maintain a constant cool temperature, and the flask may include one or more arms for cooling and circulation of the medium during the reaction.

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Albuquerque, NM, United States of America

May Nyman