Taiwan Semiconductor Manufacturing Comp. Ltd.

May-Be Chen

Yu-Der Chih

Meng-Fan Chang

Ya-Chin King

Chrong Jung Lin

Cheng-Xin Xue

Je-Syu Liu

Jonathan Tsung-Yung Chang

Burn Jeng Lin

Chieh Lee

Yun-Sheng Chen

Wen Zhang Lin

Wang-Yi Lee

Bo Yu Lin

A semiconductor fabrication apparatus and a method of using the same are disclosed. In one aspect, the apparatus includes a holder configured to place a substrate and a radiation source configured to provide radiation to transfer a pattern onto the substrate. The apparatus also includes a plurality of sensing devices configured to provide a reference signal based on an intensity of the radiation when the substrate is not present. The apparatus further includes a controller, operatively coupled to the plurality of sensing devices, configured to adjust the intensity of the radiation based on the reference signal.

Semiconductor fabrication apparatus and method of using the same

A system is provided. The system includes a multiply-and-accumulate circuit and a local generator. The multiply-and-accumulate circuit is coupled to a memory array and generates a multiply-and-accumulate signal indicating a computational output of the memory array. The local generator is coupled to the memory array and generates at least one reference signal at a node in response to one of a plurality of global signals that are generated according to a number of the computational output. The local generator is further configured to generate an output signal according to the signal and a summation of the at least one reference signal at the node.

System and method applied with computing-in-memory

A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a first transistor, a first resistive random access memory (RRAM) resistor, and a second RRAM resistor. The first resistor includes a first resistive material layer, a first electrode shared by the second resistor, and a second electrode. The second resistor includes the first electrode, a second resistive material layer, and a third electrode. The first electrode is electrically coupled to the first transistor.

Semiconductor device and method of manufacturing the same

A system includes a global generator and local generators. The global generator is coupled to a memory array, and is configured to generate global signals, according to a number of a computational output of the memory array. The local generators are coupled to the global generator and the memory array, and are configured to generate local signals, according to the global signals. Each one of the local generators includes a first reference circuit and a local current mirror. The first reference circuit is coupled to the global generator, and is configured to generate a first reference signal at a node, in response to a first global signal of the global signals. The local current mirror is coupled to the first reference circuit at the node, and is configured to generate the local signals, by mirroring a summation of at least one signal at the node.

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Hsinchu, Taiwan

May-Be Chen