Inficon Gmbh

Maximilian Reismann

Daniel Wetzig

Hendrik Van Triest

Josef Grenz

Jochen Puchalla-könig

A vacuum leak detection system may comprise a test chamber unit having a test chamber gas inlet and a test chamber gas outlet, a gas detection unit having a gas detection gas inlet and a gas detection gas outlet, and a gas control unit connecting the test chamber gas inlet and the test chamber gas outlet to the gas detection gas inlet and the gas detection gas outlet, which is connected to the test chamber unit and to the gas detection unit, and which has separate gas line paths for optionally connecting the gas inlets and the gas outlets of the test chamber unit and the gas detection unit, wherein the gas control unit has a third gas inlet which is open towards the atmosphere and which can be connected to the test chamber gas inlet via a gas line path running through the gas control unit.

Vacuum leak detection system, gas control unit and method for gas leak detection

A method for a tightness test of a test object filled with a liquid, said test object having an internal pressure which is lower than atmospheric pressure, comprising the following steps: inserting the test object into a test chamber, evacuating the test chamber to a pressure which is lower than the internal pressure inside the test object, drawing off the test chamber residual gas components together with gas components desorbing from a wall of the test chamber and parts of the liquid escaping from the test object through a leak in the latter without any carrier gas being fed to the test chamber from outside, transporting the drawn-off residual gas components together with the parts of the liquid escaped from the test object to a detector, and detecting parts of the liquid escaped through a leak in the test object by means of a detector.

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Cologne, Germany

Maximilian Reismann