Neophotonics Corporation

Bookham Technology Limited

Maxime Poirier

Marcel G Boudreau

Raghuram Narayan

Chengkun Chen

Milind Gokhale

Ian B Betty

David Seniuk

Marcel Gerard Boudreau

Optical modulators are described having a Mach-Zehnder interferometer and a pair of RF electrodes interfaced with the Mach-Zehnder interferometer in which the Mach-Zehnder interferometer comprises optical waveguides formed from semiconductor material. The optical modulator also comprises a ground plane spaced away in a distinct plane from transmission line electrodes formed from the association of the pair of RF electrodes interfaced with the Mach-Zehnder interferometer. The ground plane can be associated with a submount in which an optical chip comprising the Mach-Zehnder interferometer and the pair of RF electrodes is mounted on the submount with the two semiconductor optical waveguides are oriented toward the submount. Methods for forming the modulators are described.

High frequency optical modulator with laterally displaced conduction plane relative to modulating electrodes

Through the introduction of an imaging multimode interference device in an integrated optical circuit, such performance degradations as lateral waveguide field oscillations and backreflections may be suppressed. The suppression of lateral waveguide field oscillations (that may occur due to misaligned optical coupling), in particular, can significantly reduce variations in the power splitting ratio of an optical power splitting structure, such as those employed by a Mach-Zehnder modulator.

Waveguide mode stripper for integrated optical components

Disclosed is a print quality test structure for devices manufactured by lithography. The test structure allows for visual inspection of the print quality of the device. The test structure decouples the effects of overexposure, underexposure and focus so that corrections can be made for future device manufacturing. By visually inspecting each device during lithography, devices of poor quality can be reworked, and costly testing on all devices can be avoided through device screening.

Print quality test structure for lithographic device manufacturing

Growing community of inventors

Gatineau, Canada

Maxime Poirier