Murata Manufacturing Co., Ltd.

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Maxime Lemenager

Frédéric Voiron

Guy Parat

Julien El Sabahy

A semiconductor device that includes a porous anodic region for embedding a structure. The porous anodic region is defined by a ductile hard mask. The ductility of the hard mask reduces the potential for the hard mask to crack during the formation by anodization of the porous anodic region. The ductile hard mask may be a metal. The metal may be selected to form a stable oxide when exposed to the anodization electrolyte thereby enabling the hard mask to self-repair if a crack occurs during the anodization process.

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Caen, France

Maxime Lemenager