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Rino Ernst Kunz

Philipp N Zeller

The integrated-optical chemical and/or biochemical sensor comprises a resonant waveguide grating structure ( , . . . ), e.g., a chirped grating. By illumination with incident light ( ), a resonant electromagnetic field is excited in the grating structure ( , . . . ). At least one parameter of the incident light, e.g., the angle of incidence (&thgr; ) or the wavelength (&lgr; ), is varied. Light ( ) excident from the grating structure ( , . . . ) is detected by detectors ( , . . . ). Optionally, means for providing a feedback from the detectors ( , . . . ) to the light sources may be provided, thus establishing a controlled closed-loop system. Hence independent simultaneous measurements in a multiple arrangement of such sensors (S , S , . . . ) is made possible. Moreover, a much higher density of sensors (S , S , . . . ) results.

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