Balzers Aktiengesellschaft

Unaxis-Balzers Aktiengesellschaft

Unaxis Balzers Limited

Oerlikon Trading Ag, Truebbach

Oc Oerlikon Balzers Ltd.

Oerlikon Surface Solutions Ag, Pfaffikon

Oerlikon Trading Ag, Trubbach

Oerlikon Surface Solutions Ag, Trubbach

Mauro Pedrazzini

Johann Karner

Erich Bergmann

Christian Wohlrab

Orlaw Massler

Martin Grischke

Hubert Eberle

Thorsten Michler

Volker Derflinger

Ingrid Reineck

Mats E Sjostrand

Oliver Gstoehl

Christoph Hollenstein

David Franz

Roger Seeli

A process and an arrangement by means of which it is possible to generate a layer system for the protection against wear, for the protection against corrosion and for improving the sliding properties or the like, which has an adhesive layer for the arrangement on a substrate, a transition layer for the arrangement on the adhesive layer and a cover layer of an adamantine carbon, the adhesive layer including at least one element from the Group which contains the elements of the 4, 5and 6Subgroup and silicon, the transition layer comprising carbon and at least one element from the above-mentioned Group, and the cover layer consisting essentially adamantine carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF.

DLC coating system and process and apparatus for making coating system

The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition layer to be arranged on the adhesion layer and a covering layer of diamond-like carbon, wherein the adhesion layer comprises at least one element of the group of elements that contains the elements of the fourth, fifth and sixth subgroup of the periodic table and silicon, the transition layer comprises carbon and at least one element of the aforesaid groups and covering layer consists essentially of diamond-like carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF according to VDI 382l, Sheet The process used for the production of this layer system is such at the initial introduction of the substrate into a vacuum chamber and pumping to produce a vacuum of at least 10mbar, preferably 10mbar, is at first followed by the cleaning of the substrate surface to remove any adhering impurities and then by the plasma-supported deposition of the adhesion layer. Subsequently the transition layer is applied by the simultaneous deposition of the components of the adhesion layer and the deposition of carbon from the gaseous phase by means of plasma-CVD. The diamond-like carbon layer is then applied solely by means of plasma-supported deposition of carbon from the gaseous phase. During the process a biasing voltage is applied to the substrate, this voltage being pulsed in the medium-frequency range, while a superposed magnetic field stabilizes the plasma in the individual process steps. An appropriate device for carrying out the coating process therefore consists of a vacuum chamber () with a pumping system () for the production of a vacuum in the vacuum chamber, substrate holding devices () to receive the substrates to be coated, at least one gas supply unit () for dosing the supply of process gas, at least one vaporizer device () to make available coating material for deposition, an arc generation device () to ignite a low-voltage d.c. arc, a device () for the generation of a substrate biasing voltage and with at least one or several magnetic field generator devices () for the formation of a far magnetic field. The invention also describes a DLC-slipping layer system and a process for the production of such a system, which on its surface side is provided with an an additional slipping layer.

DLC layer system and method for producing said layer system

A vacuum system for the treatment of work pieces has an evacuatable treatment chamber having a centrally disposed low voltage arc discharge arrangement and laterally disposed loading opening. A coupling device between the work piece support and a receiving device on the system side allows simplified loading and removal of the work pieces to be treated along with the support by simply lifting onto or lowering from the receiving device.

Vacuum system with separable work piece support

The invention relates to an arc source or a source for vaporizing or sputtering of materials and a method for operating a source. The source comprises an insulated counter-electrode and/or an AC magnet system. Thereby, dependent on the requirement, any desired potential can be applied to the counter-electrode and/or the source can be operated with different magnet systems, in particular as arc or sputter source.

Source for vacuum treatment process

Vacuum treatment installation with a vacuum treatment chamber containing a plasma discharge configuration as well as a gas supply configuration. The plasma discharge configuration has at least two plasma beam discharge configurations with substantially parallel discharge axes and a deposition configuration is positioned along a surface which extends at predetermined distances from the beam axes and along a substantial section of the longitudinal extent of the discharge beam.

Installation and method for vacuum treatment or powder production

Method for coating workpieces generates a beam of a plasma in an evacuated container. A region of highest plasma density is at the beam axis and workpieces having surfaces to be coated, are radially offset from, and extend along the axis with the surfaces facing the axis and being in the container. Fresh reactive gas is inlet into the container and consumed gas is removed from the container. Coating material is deposited upon the surfaces with a deposition rate of at least 400 nm/min and at a maximum temperature of the surfaces being 550&deg; C.

Coating workpiece method using beam of plasma

A process provides for the reactive treatment of workpieces in which a plasma beam is produced in an evacuated recipient. With respect to the area of the highest plasma density along the beam axis, workpieces are arranged in a radially offset manner. Fresh reactive gas is charged into the recipient and used-up gas is sucked out of the recipient. A vacuum treatment system comprises a plasma beam production arrangement, a gas inlet operatively connected with a reactive gas supply, an axially extending workpiece carrier arrangement radially set off from an axis of a plasma beam produced by the plasma beam production arrangement. The workpiece carrier arrangement mounts a rotational surface coaxial with respect to the axis of the plasma beam and a gas suction system. The process and system are used to deposit metastable layers, including cBN-layers, .alpha.-Al.sub.2 O.sub.3 layers, C.sub.3 N.sub.4 layers, and diamond layers, on the workpieces, to surface treat with reactive chemical compounds, including free radicals, and to coat.

Vacuum treatment system for homogeneous workpiece processing

Coated body, method for its manufacturing as well as its use

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Mauro Pedrazzini