Telefonaktiebolaget Lm Ericsson (publ)

Micronic Laser Systems Ab

Mattias Israelsson

Anders Emericks

Henrik Helmer Hellberg

Carl-Henrik Jorgen Malmgren

Peter Ekberg

Torbj&ouml;rn Sandstr&ouml;m

Leif Odselius

Ingvar Gustaf Andersson

Stefan Gullstrand

The present invention relates to a system and a method for microlithographic writing and inspection on photosensitive substrates, and specially printing and inspection of patterns with extremely high precision, such as photomasks for semiconductor device patterns, display panels, integrated optical, devices and electronic interconnect structures. More specifically the invention relates to compensation of substrate offset by modifying the position data or the feeding of the same of the deflector, and the use of a direct digital synthesis (DDS) unit for generation of the sweep frequency drive signal.

Beam positioning in microlithography writing

Line circuits can be supplied with a first voltage or a second voltage of a lower absolute value. At least the second voltage is variable. The line voltages of at least active line circuits are measured, and possible values for the second voltage are prognosticated. It is determined which line circuits can be supplied with the respective possible value, and the power consumption of those line circuits is calculated using each possible value. For the line circuits which cannot be so supplied, the power consumption is calculated using the first voltage. For each possible value prognosticated for the second voltage, the total power consumptions are summed, and the value that gives the lowest total power consumption is selected as the second voltage. The line circuits are then supplied with the first voltage or the selected second voltage.

Method and arrangement for choosing supply voltage

The present invention relates to a method and a device for diversion of power in an electric circuit (,), e.g. a subscriber circuit with a balanced two-wire transmission, comprising a user (,) with a variable voltage requirement, which is controlled by the supply characteristic of the device and the resistance in the two-wire transmission (A,B,L). The voltage requirement of the user is fed back via a reference signal (U,) to an input of a voltage-regulating circuit (,), which supplies the user with a drive voltage (V,) adapted to the value of the reference signal. The voltage-regulating circuit (,) is fed with a supply voltage (V,) and a regulator voltage (V,) is defined as the difference between the drive voltage (V,) and the supply voltage (V,). Parallel with the voltage-regulating circuit, an external device (,), e.g. a resistance, is connected in order to divert an undesired power generation in the voltage-regulating circuit through the whole or part of the supply current of the user being led to the external resistance and there the whole or part of the power generation is emitted.

System and method for dissipating heat in an electric device

In a subscriber line interface circuit connected to a telephone line having a high potential wire and a low potential wire, an arrangement for generating a signal for determining the line voltage comprises means (,) for alternately charging a capacitor (,), by means of a first DC current, to a first voltage, and discharging the capacitor (,), by means of a second DC current, to a second voltage. Hereby, a sawtooth wave having an amplitude corresponding to the difference between the first and second voltages is produced. This sawtooth wave is converted to a pulse train related to the line voltage, from which the line voltage can be determined.

Arrangement in a subscriber line interface circuit

In a subscriber line interface circuit connected to a two-wire telephone line (A and B lines) for transmitting AC signals, one of the wires (e.g., the A line) is set to a DC voltage lower (i.e., more negative) than a first DC voltage (GND), while the second wire (e.g., the B wire) is set to a DC voltage lower than the DC voltage of the first wire, but higher than a second DC voltage (VREG). A first voltage generator is provided for setting a first threshold voltage (VTHA) between the first DC voltage (GND) and the DC voltage of the first wire. A second voltage generator is provided for setting a second threshold voltage (VTHB) between the second DC voltage (VREG) and the D voltage for the second wire. The first and second threshold voltages are utilized for transmission and reception of AC signals on the respective A and B wires. As long as the instantaneous value (VA) of the signal on the first wire (A) equals the first threshold voltage (VTHA) and/or the instantaneous value (VB) of the signal on the second wire (B) equals the second threshold voltage (VTHB), the subscriber line interface circuit automatically adjusts the signal headroom to the actual amplitude of the AC signals by controlling the voltage difference (VA) between the first DC voltage (GND) and the DC voltage of the first wire (A) and/or the voltage difference (VB) between the DC voltage of the second wire (B) and the second DC voltage (VREG).

Growing community of inventors

Stockholm, Sweden

Mattias Israelsson