Universitetet I Oslo

Beneq Oy

Asm IP Holding B.v.

Matti Putkonen

Helmer Fjellvåg

Titta Aaltonen

Ola Nilsen

Mari Endresen Alnes

Mikko Ritala

Markku Rajala

Anton Vihervaara

Olli Jylhä

Arto Pakkala

Paloma Ruiz Y Kärkkäinen

The present disclosure relates to methods and apparatuses for depositing transition metal carbide-containing material on a substrate by a cyclic deposition process. The method comprises providing a substrate in a reaction chamber, providing a transition metal precursor into the reaction chamber in a vapor phase; and providing a second precursor into the reaction chamber in a vapor phase to form transition metal carbide-containing material on the substrate. The second precursor comprises a cyclic diene compound comprising a substituent comprising metalloid.

Method and system for depositing transition metal carbide

A method for the formation of lithium includes a layer on a substrate using an atomic layer deposition method. The method includes the sequential pulsing of a lithium precursor through a reaction chamber for deposition upon a substrate. Using further oxidizing pulses and or other metal containing precursor pulses, an electrolyte suitable for use in thin film batteries may be manufactured.

Formation of a lithium comprising structure on a substrate by ALD

A strengthened structural module () and a method for fabricating a strengthened structural module (). The module comprises an essentially planar glass substrate (), an essentially planar second substrate (), and at least one spacer element () in between the glass substrate () and the second substrate (). The at least one spacer element () keeps the glass substrate () and the second substrate () separated from each other from the edges of the two substrates and defines a space () in between the two substrates in the inside of the module. The module comprises a coating () surrounding the module around the outside of the module. The coating () is arranged conformally on the surfaces facing the outside of the module, for increasing the strength of the module.

Strengthened structural module and method of fabrication

A method for increasing the durability of glass by a coating, according to the present invention comprises the step of coating glass with a coating comprising at least one layer whose thickness is below 5 nanometers, wherein the coating comprises a compound of at least one element.

Method for increasing the durability of glass

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Espoo, Finland

Matti Putkonen