University of California

Matthijs Van Spronsen

Miquel Salmeron

Adam Schwartzberg

Yi-Hsien Lu

Carlos Morales Sanchez

Xiao Zhao

This disclosure provides systems, methods, and apparatus related to thin free-standing oxide membranes. In one aspect, a method includes providing a substrate. The substrate defines a hole having a diameter of about 500 nanometers to 5000 nanometers. A layer of metal is deposited on the substrate. A supporting layer is deposited on the layer of metal. A first side of the supporting layer is the side that is disposed on the layer of metal. A metal oxide layer is deposited on the first side of the supporting layer and on the substrate. In some implementations, the method further includes removing the supporting layer.

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Berkeley, CA, United States of America

Matthijs Van Spronsen