Lambda Physik Ag

Qioptiq Photonics Gmbh & Co Kg

Matthias Ulrich

Juergen Kleinschmidt

Peter Lokai

Konstantin Aab

Arnold Sonntag

Thomas Thöniss

Method for producing an objective, in which the outer mounting includes an outer surface that is, at least in sections, limited by a plane which extends inclined toward the optical axis or which extends at a distance from the optical axis.

Method for producing an objective

A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, and a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam. The resonator further includes a third reflecting surface which is deformable and disposed between the pair of resonator reflecting surfaces. The line-narrowing/selection unit preferably includes a beam expander and a dispersive element, wherein the deformable third reflecting surface is disposed between the beam expander and the dispersive element.

Resonator arrangement for bandwidth control

Growing community of inventors

Rosdorf, Germany

Matthias Ulrich