Siemens Aktiengesellschaft

Pyreos Ltd.

Infineon Technologies Ag

Biomensio Ltd

Matthias Schreiter

Reinhard Gabl

Carsten Giebeler

Wolfram Wersing

Dana Pitzer

Alexander Michael Gigler

Stephan Buchholz

Martin Jenkner

Evamaria Stütz

Mathias Link

Franz Hofmann

Roland Thewes

Rainer Bruchhaus

Jörg Zapf

Christian Paulus

Thorsten Steinkopff

Thomas Huber

Bjorn-Oliver Eversmann

Peter Fromherz

Robert Primig

Martin Nirschl

Tamara Birkenmaier

Björn Eversmann

Uwe Rettig

Jan Weber

A test kit that is configured for bioanalysis, such as an immunoassay, is provided. The test kit includes at least one measuring sensor for quantitative detection of a substance, and at least one reference sensor that is already supplied with the substance in a defined manner. In a method for analyzing a test kit, the at least one measuring sensor is read, and a measurement value for a concentration, a substance quantity, or a mass is obtained. A read value of the at least one measuring sensor is scaled using read values of the at least one reference sensor, or a measured value that corresponds to the read value is obtained using a compensation curve that puts the read values of the at least one reference sensor into relationship with the defined supply of the substance to the at least one reference sensor.

Bioanalysis test kit and method for analyzing such a test kit

The invention relates to a test kit which is designed for bioanalysis, in particular for an immunoassay. The test kit comprises at least one measuring sensor (M) for the quantitative detection of a substance and at least one reference sensor (R, RR) which is already supplied with the substance in a defined manner. In the method for analyzing a test kit, the measuring sensor (M) is read and a measurement value for a concentration, a substance quantity, or a mass is obtained, wherein the read value of the at least one measuring sensor (M) is scaled using the read values of the at least one reference sensor (R, R, R), or a measured value which corresponds to the read value is obtained by means of a compensation curve which puts the read values of the reference sensors (R, R, R) into relationship with the defined supply of the substance to the reference sensors (R, R, R).

The invention relates to a method for producing a polycrystalline ceramic film on a surface () of a substrate (), in which a particle stream is directed onto the surface () and the ceramic film is formed by deposition of the particles onto the surface (), wherein the particle stream is directed by means of a diaphragm onto the surface () along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface () enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface () until a specified second layer thickness has been reached.

Method for producing a polycrystalline ceramic film

A method for producing a micro system, said method comprising: providing a substrate () made of aluminum oxide; producing a thin film () on the substrate () by depositing lead zirconate titanate onto the substrate () with a thermal deposition method such that the lead zirconate titanate in the thin film () is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate () together with the thin film ().

Method for producing a microsystem having a thin film made of lead zirconate titanate

In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalized silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.

Device having a membrane structure for detecting thermal radiation, and method for production thereof

A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency fwhich depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer.

Device and method for detecting a substance using a thin film resonator (FBAR) having an insulating layer

A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.

Device to detect thermal radiation with high resolution method to manufacture and use the device

In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having &#x3bb;/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor).

Arrangement of a piezoacoustic resonator on an acoustic mirror of a substrate, method for producing the arrangement and use of the arrangement

In a method for production of a polycrystalline ceramic film on a substrate: a) the substrate is prepared with the substrate surface and preparation of at least one source for the ceramic particles of the ceramic film and b) a particle stream of the ceramic particles is generated from the source of ceramic particles in the direction of the substrate surface on the substrate, with deposition of the ceramic particles on the substrate surface on the substrate with formation of the ceramic film. At least one screen is arranged within the gap, for adjusting an average incidence angle of the ceramic particles relative to a plane normal of the substrate surface, such that the ceramic particles are deposited on the substrate surface at a preferred direction and a relative position of the substrate surface and the screen is altered while the gap remains essentially the same.

Method for producing a polycrystalline ceramic film on a substrate using a shutter

In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

Device with a sandwich structure for detecting thermal radiation, and method for the production thereof

An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element () having at least one piezoelectric layer () and two electrodes (and) present on the piezoelectric layer (). The piezoacoustic resonator element () is designed such that, owing to a voltage being applied to the piezoelectric layer () by means of the electrodes (or), a volume oscillation of the piezoelectric layer () is excited at a resonant frequency. The piezoelectric resonator element () can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements () for detecting the attachment of substance.

Apparatus and method for moving a liquid by means of a piezoelectric transducer

The invention relates to a device () which comprises at least one piezoacoustic resonator element () having a piezoelectric layer () and two electrodes that are electrically contacted to the piezoelectric layer (). The piezoacoustic resonator element () is configured in such a manner that, when a voltage is applied to the piezoelectric layer (), a thickness oscillation of the piezoelectric layer () is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (), a temperature measurement device () having a measuring element () that is configured as a thin layer.

Device comprising a piezoelectric resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency

Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO.

CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues

The present invention relates to a biochip for capacitive stimulation and/or detection of biological tissue. The biochip includes a support structure, at least one stimulation and/or sensor device, which is arranged in or on the support structure, and at least one dielectric layer, one layer surface of which is arranged on the stimulation and/or sensor device and the opposite layer surface forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue. The dielectric layer includes (Ti, Zr)O, with 0.99&#x2267;x&#x2267;0.5, or a TiOand ZrOlayer arrangement.

Biochip for the capacitive stimulation and/or detection of biological tissue and a method for its production

A method for producing self-polarized ferroelectric layers, in particular PZT layers, with a rhombohedral crystal structure includes providing a substrate and heating it to a temperature T Afterward the layer with a rhombohedral crystal structure is applied to the substrate by means of a sputtering method. This layer includes a Zr-deficient layer with a Curie temperature TC and a Zr-abundant layer with a Curie temperature TC wherein TC TC T After the ending of the application process, the heating of the substrate is also discontinued so that the substrate cools. As a result of the cooling the Zr-deficient layer and then the Zr-abundant layer reach their Curie temperature, and change into the ferroelectric phase and become self-polarized in the process. The polarization already present in the Zr-deficient layer induces the polarization in the Zr-abundant layer, with the result that both layers are self-polarized after the cooling process.

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Munich, Germany

Matthias Schreiter