Institut Fur Mikrotechnik Mainz Gmbh

Institute Fur Mikrotechnik Mainz Gmbh

Matthias Nienhaus

Wolfgang Ehrfeld

Felix Schmitz

Stephan Kleen

Lutz Weber

Frank Michel

Udo Berg

Marc Begemann

Hans-Dieter St&ouml;lting

Yannick Ansel

Manfred Lacher

The invention relates to an assembly device for microcomponents that are disposed in a magazine. The inventive assembly device does not require any optical systems and allows for an exact positioning of the microcomponents. The assembly will also be unaffected by any position changes of the microcomponents caused by wastage. The assembly device is provided with mechanical alignment devices that engage with or act upon adjustment structures of the magazine. The assembly device further comprises clamping devices for fixing the magazine and at least one plunger for ejecting at least one microcomponent from the magazine. An assembly platform is provided in the upper tool or in the lower tool of the assembly device and receives the microcomponents in a defined position. The invention further relates to a method for assembling microcomponents and to a corresponding magazine.

Magazine, assembly device for microcomponents

The invention relates to a flat coil and to a lthographic method for producing microcomponents with metal component sources in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produe the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided. The invention also relates to a method for producing microcomponents with component structures of cross-linkable resist material and to a flat coil for micromotors with at least one coil layer with strip conductors in the sub-millimeter range.

Flat coil and lithographic method for producing microcomponents

The object of the invention is to produce multipole magnetic systems that are composed of a plurality of individual magnetic components that preferably are made of rare-earth magnetic material. The invention relates to a method for producing and magazining at least one individual magnetic component, a magazine for at least one individual magnetic component by molding and for conventionally magnetizing the same. The invention further relates to a method of assembly for producing a magnetic system and to the resulting magnetic systems. The invention teaches that extremely flat multipole magnetic systems in the form of magnet rings or magnet strips and three-dimensional magnet bodies such as a magnetic scale, for example, can be produced by means of individual magnetic components that are directly adjacent to each other or are arranged at a distance by means of a molding material, for example. The magnetic systems taught by the invention are provided with a particularly high level of integration of the individual magnetic components and a uniform overall magnetization of the magnet segments which, acting as permanent magnet components, can be used in electromagnetic drives, magnetic path and angle measuring systems, magnetic couplings and valves, for example.

Method for producing and magazining individual magnetic components and the assembly thereof for producing miniaturized magnetic systems and such magnetic systems

The invention relates to a lithographic method for producing microcomponents with component structures in the submillimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer. Said epoxide resin is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resin structures with metal by electroplating. The aim of the invention is to provide an adhesive layer that is suitable for photostructured epoxy resins, especially for SU-8 resist material and that prevents the resist material from being detached. To this end, the adhesive layer consists of polyimide or a polyimide mixture.

Use of polyimide for adhesive layers, lithographic method for producing microcomponents and method for producing composite material

The invention relates to a disk motor with an armature disk, which is rotatably mounted and provided with permanent magnets, and with a stator which comprises a stator plate which is equipped with coils. The aim of the invention is to provide a disk motor that is as flat as possible and that is characterized by an improved smoothness of running. To this end, an annular soft-magnetic prestressing device is arranged concentrically on the stator plate in such a manner that at least one section of the prestressing device is located below the coil window of the coils in the axial direction. The armature disk may support an annular flux-return element opposite which the annular prestressing device is located in the radial direction. Said prestressing device has a cross-sectional contour that guides the magnetic lines of electric flux from the annular flux-return element to the coil window.

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Mainz, Germany

Matthias Nienhaus