Epcos Pte Ltd

Epcos Ag

Sonion A/s

Sonion Mems A/s

Matthias Müllenborn

Aart Zeger Van Halteren

Pirmin Rombach

Siebe Bouwstra

Maja Amskov Gravad

Ole Hansen

Matthias Heschel

Igor Mucha

Lars Jørn Stenberg

Henrik Laurids Hvims

Jorgen B Elmer, Legal Representative

Jørgen B Elmer, Legal Representative

Henrick Laurids Hvims

A solid state silicon-based condenser microphone comprising a silicon transducer chip (). The transducer chip includes a backplate () and a diaphragm () arranged substantially parallel to each other with a small air gap in between, thereby forming an electrical capacitor. The diaphragm () is movable relative to the backplate () in response to incident sound. An integrated electronic circuit chip () or ASIC is electrically coupled to the transducer chip (). An intermediate layer () fixes the transducer chip () to the integrated electronic circuit chip () with the transducer chip () on a first side of the intermediate layer () and the integrated electronic circuit chip () on a second side of the intermediate layer () opposite the first side. The intermediate layer () has a sound inlet () on the same side as the ASIC giving access of sound to the diaphragm.

Solid state silicon-based condenser microphone

A silicon-based transducer assembly coupled to a movable structure in a hearing instrument. The transducer assembly includes at least one microphone chip and an ASIC having multiple integrated components such as any combination of a DSP, an A/D converter, an amplifier, a filter, or a wireless interface. The movable structure may be a battery access door, a volume dial, a switch, or a touch pad. A protection strip can be disposed across the battery access door to prevent debris from clogging the silicon-based transducer assembly. The transducer assembly may also include an array of microphone chips to achieve adaptive beam steering or directionality. When equipped with a wireless interface, the hearing instrument wirelessly communicates with another hearing instrument or with a network.

Silicon-based transducer for use in hearing instruments and listening devices

The present invention provides a miniature MEMS microphone comprising a single-ended transducer element connected to an amplifier providing a differential electrical output at terminals arranged at a substantially plane exterior surface. The differential or balanced output signal provides a miniature microphone exhibiting a high dynamic range and a reduced susceptibility to EMI. The microphone is adapted for surface mounting thus the extra output terminal required is still suitable for low cost mass production. In preferred embodiments the transducer element and amplifier are silicon-based. The microphone may have a plurality of separate single-ended transducer elements connected to separate amplifiers providing separate differential outputs. The microphones according to the invention are advantageous for applications within for example hearing aids and mobile equipment.

Miniature microphone with balanced termination

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Lyngby, Denmark

Matthias Müllenborn