Robert Boschgmbh

Matthias Meier

Johannes Classen

Christoph Lang

Burkhard Kuhlmann

Udo-Martin Gomez

Wolfram Bauer

Rainer Willig

Mathias Reimann

Michael Veith

Ermin Esch

Hans-Dieter Schwarz

Andrea Visconti

Ruslan Khalilyulin

Wolfram Geiger

Thomas Zebrowski

Recalibrating a micromechanical sensor. The sensor is assigned a signal processing device for correcting the sensor signal on the basis of at least one previously determined initial trim value that is selected such that, given a defined sensor excitation, a production-related deviation of the sensor signal from a target sensor signal is compensated. The method for recalibrating the sensor includes: applying a defined electrical test excitation signal to the sensor structure, acquiring the corresponding sensor response signal, ascertaining a trim correction value for the at least one initial trim value on the basis of a previously determined relation between the sensor response signal and the trim correction value, and determining at least one current trim value for correcting the sensor signal, the determination of the at least one current trim value taking place on the basis of the at least one initial trim value and the ascertained trim correction value.

Method for recalibrating a micromechanical sensor, and recalibrateable sensor

A yaw rate sensor () includes a movable mass structure () and a drive component () which is suitable for setting the movable mass structure () in motion (), and an analysis component () which is suitable for detecting a response () of the movable mass structure () to a yaw rate (&#x3a9;). A method for functional testing of a yaw rate sensor () includes the following steps: driving a movable mass structure (), feeding a test signal () into a quadrature control loop () at a feed point () of the quadrature control loop (), feeding back a deflection () of the movable mass structure (), detecting a measure of the feedback of the movable mass structure (), and reading out the response signal () from the quadrature control loop (). In the yaw rate sensor () and also in the method, the readout of the response signal () in relation to a processing direction () of the test signal () is provided between a feed point () for a test signal () and an actuator () for feeding back a deflection () of the movable mass structure ().

Self-test for yaw rate sensors

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Reutlingen, Germany

Matthias Meier