Von Ardenne Anlagentechnik Gmbh

Applied Materials, Inc.

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

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Falk Milde

Joerg Fiukowski

Hans-Christian Hecht

Gerd Kleideiter

Sven Schramm

Udo Schreiber

Christoph Koeckert

Uwe Krause

A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.

Layer system that can be annealed and method for producing the same

Annealable layer system

The invention relates to a silver low-E coating for glass which is temperable and can be applied by means of sputter processes onto the glass. The individual layers of the coating are cost-effective standard materials. One embodiment of the invention for example is comprised of a glass substrate, an SiNlayer disposed thereon of a thickness of approximately 15 nm, a TiOlayer of 15 nm thickness on the SiNlayer, a 12.5 nm thick Ag layer on the TiOlayer, a NiCrOlayer of approximately 5 nm thickness on the Ag layer and a terminating 45 nm thick SiNlayer.

Temperable glass coating

A layer system that filters sun and heat can be applied to glass by a vacuum coating process. The system comprises at least one series of metal layers in addition to a respective series of lower dielectric layers and a respective series of upper dielectric layers. At least one series of metal layers and one series of upper and lower dielectric layers are configured as a sandwich system, wherein one metal layer is encapsulated by an upper and a lower intermediate layer consisting of hypostoichiometrically nitrided or oxidized metal of the metal layer and sandwich systems of the series of layers contain individual sandwich layers of a stoichiometric and hypostoichiometric oxide or nitride of a metal or semiconductor. An oxygen or nitrogen deficit of the sandwich layers increases towards a neighboring sandwich system and the oxide and nitride layers are produced in a vacuum coating process.

Thermally treatable layer assembly that filters sun and heat and method for producing the same

Process and device for reducing an ignition voltage of power pulses in plasmas operated in a pulsed manner with long pulse-off times. The process includes generating a power pulsed plasma at a pulse duty factor, the pulse duty factor being a ratio of pulse-on time to pulse-off time, and at least before the beginning of the pulse-on time of the power pulses, producing charge carriers using an additional plasma discharge at a lower power than that of the power pulses. The device includes a vacuum chamber including at least one pump system, an arrangement for producing plasma, the arrangement including at least one anode and at least one cathode, an energy source connected to the cathode and the anode which can be pulsed in the frequency range of between approximately 10 Hz to approximately 1 MHZ, and a mechanism for one of producing an additional plasma discharge.

Process and device for reducing the ignition voltage of plasmas operated using pulses of pulsed power

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Dresden, Germany

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