Tdk Corporation

Matthias König

Andreas Barbul

Matthias Schmidt

Markus Mayr

A gas sensor with improved sensitivity. The gas sensor comprises an active sensor unit, a reference sensor unit and a temperature control circuit. The active sensor unit has an active detector. The reference sensor unit has a reference detector. The temperature control circuit is provided and configured to keep a detector at a predetermined temperature.

Gas sensor with improved sensitivity and gas sensor component

In an embodiment a sensor system includes a first sensor having a first thermistor configured to sense a change in heat flow and a first heater configured to heat the first thermistor and a second sensor having a second thermistor configured to sense a change in heat flow and a second heater configured to heat the second thermistor, wherein a heat conduction path between the first heater and the first thermistor has a higher thermal conductivity than a heat conduction path between the second heater and the second thermistor.

Sensor system, sensor array and process of using the sensor system

A sensor device and an electronic assembly are disclosed. In an embodiment a sensor device includes a first pellistor element, a second pellistor element, a heater element, a first temperature sensor element and a second temperature sensor element, wherein the heater element and the first temperature sensor element are part of the first pellistor element and the heater element and the second temperature sensor element are part of the second pellistor element.

Sensor device and electronic assembly

A method for testing a gas sensor and a gas sensor are disclosed. In an embodiment a method for testing at least one gas sensor includes exposing in a first measurement the gas sensor to a test gas under first gas conditions including a first pressure and exposing in a second measurement the gas sensor to the test gas under second gas conditions including a second pressure, the second gas conditions being different from the first gas conditions, wherein the second pressure is different from the first pressure, and/or wherein the gas sensor is exposed to an intermediate pressure different from the first pressure between the first measurement and the second measurement.

Method for testing a gas sensor

In an embodiment a method for compensating a temperature gradient effect for gas concentration sensors includes variating a temperature gradient, measuring a variation of gas concentration depending on the variation of the temperature gradient, analysing a dependence of the gas concentration and the temperature gradient for setting up an error correction function and applying the error correction function to correct measured values of the gas concentration.

Method and device for compensating temperature gradient effects

In an embodiment a sensor device includes a substrate with a first membrane and a first cover layer, the first membrane and the first cover layer being monolithically integrated into the substrate and a first pellistor element including a heater element and a temperature sensor element, the heater element and/or the temperature sensor element being arranged in or on the first membrane, wherein the first cover layer is arranged over or under the first membrane, and wherein the first membrane, the first cover layer and a part of the substrate surround a first cavity.

Sensor device, method for manufacturing a sensor device and sensor assembly

In an embodiment A package includes a casing having an opening and enclosing a cavity, a die accommodated in the cavity and a membrane attached to the casing, the membrane being air-permeable, covering and sealing the opening, wherein the membrane is configured to allow only a lateral gas flow, and wherein a blocking member is configured to block a vertical gas flow through the membrane into the cavity, the blocking member tightly covering a surface of the membrane at least in an area comprising the opening.

Packaged die and assembling method

A photoacoustic measurement setup having an infrared radiator that is suitable for radiating broadband light with periodically modulated energy/intensity. The infrared radiator is configured to change an excitation spectra of a radiated broadband light, and a gas volume is heated by the radiated broadband light to generate an acoustic wave within the gas volume. The photoacoustic measurement setup also includes an acoustic sensor, which is suitable for measuring the acoustic wave generated in the gas volume.

Photoacoustic measurement setup and method for detecting a gas

A method and apparatus for operating a gas sensor are disclosed. In an embodiment a method for operating a gas sensor includes providing, by at least one gas sensor element, a sensing signal and correcting, by a neural network, the sensing signal, wherein the neural network comprises an input layer, an output layer and at least one hidden layer, wherein the input layer comprises a given number k&#x3e;1 of input neurons for each gas sensor element, and wherein a respective gas sensor element provides its sensing signal to one of the corresponding input neurons dependent on a measurement parameter applied to the at least one gas sensor element.

Method and apparatus for operating a gas sensor

A MEMS gas sensor is disclosed. In an embodiment a MEMS gas sensor includes a carrier having a recess, a gas sensitive element arranged in the recess and a shielding layer at least partially covering the recess.

MEMS gas sensor

A method for operating a sensor device for measuring a concentration of a gas species in a gas is disclosed. In an embodiment, the method includes recording a set of data points by performing a plurality of measurements of a temperature sensor element reading, wherein each of the measurements is performed with a different heater setting of the first pellistor element and each of the measurements results in a data point of the set of data points, performing a curve fit of an evaluation function to the set of data points, wherein the evaluation function comprises a first function and a second function, wherein the first function is based on an ideal behavior of the first pellistor element, and wherein the second function is a temperature-dependent steadily rising or steadily falling function and determining the concentration of the gas species in the gas from the curve fit.

Method for operating a sensor device

A sensor device, a method for operating a sensor device and an electronic assembly comprising a sensor device are disclosed. In an embodiment a sensor device includes a first sensor unit and a second sensor unit in a common housing, wherein each of the first and second sensor units comprises a heater element and a temperature sensor element, wherein the housing comprises a cover element having an opening, the cover element covering the first sensor unit, and wherein the opening is arranged over the second sensor unit.

Sensor device, method for operating a sensor device and electronic assembly comprising a sensor device

A method for testing a plurality of sensor devices, a panel and a sensor component are disclosed. In an embodiment a method includes providing the plurality of sensor devices, each sensor device including a sensor element configured to sense an ambient condition, a heating element to heat the sensor element, connection terminals for a supply voltage and at least one connection terminal for a sense signal indicative of a state of the sensor element, providing a panel including a plurality of groups of connection pads, the connection pads of each one of the groups configured to be connected to the connection terminals of one of the sensor devices, mounting the sensor devices to the groups of connection pads, applying a supply voltage to the sensor devices and concurrently heating the heating elements of the sensor devices to an elevated temperature and calibrating the sensor devices at least one after another.

Growing community of inventors

Munich, Germany

Matthias König