Carl Zeiss Smt Gmbh

Matthias Kuss

Damian Fiolka

Manfred Maul

Vladimir Davydenko

Gerd Reisinger

A beam delivery system of a projection exposure system comprises a laser generating a beam of laser light from a plurality of longitudinal laser modes in a cavity, wherein light generated by a single longitudinal laser mode has an average line width &#x3bb;, wherein the laser light of the beam has, at each of respective lateral positions of the beam, a second line width &#x3bb;corresponding to lateral laser modes, and wherein the laser light of the beam has, when averaged over a whole cross section thereof, a line width &#x3bb;corresponding to plural lateral laser modes, and wherein &#x3bb;&#x3c;&#x3bb;&#x3c;&#x3bb;, and wherein an optical delay apparatus disposed in the beam provides an optical path difference &#x394;l, wherein wherein &#x3bb;is an average wavelength of the light of the first beam of laser light, and &#x394;&#x3bb;represents the second line width.

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Munich, Georgia

Matthias Kuss