Rf360 Singapore Pte. Ltd.

Siemens Aktiengesellschaft

Matthias Honal

Tomasz Jewula

Stefan Popescu

Thomas Mertelmeier

Martin Hoheisel

Jörg Freudenberger

Eckhard Hempel

Joachim W Baumann

Franz Pfeiffer

Christian David

Manfred Schuster

Martin Engelhardt

Siew Ling Koh

Siew Li Poh

Pei Wen Qiao

Certain aspects of the present disclosure provide a surface acoustic wave (SAW) device with one or more intermediate layers for reduced self-heating and methods for fabricating such a SAW device. One example SAW device generally includes a piezoelectric layer and an interdigital transducer (IDT) disposed above the piezoelectric layer. The IDT generally includes a first electrode having a first busbar and a first plurality of fingers. The first electrode generally includes a first copper layer disposed above the piezoelectric layer, a first intermediate layer disposed above the first copper layer, the first intermediate layer comprising a different material than the first copper layer, and a second copper layer disposed above the first intermediate layer.

Surface acoustic wave (SAW) device with one or more intermediate layers for self-heating improvement

An electro-acoustic resonator comprises a piezoelectric substrate on which an electrode structure is disposed. The electrode structure comprises a metal layer of aluminum and copper, a barrier layer forming a barrier against the diffusion of copper and another metal layer disposed on the barrier layer comprising aluminum. An AlCu intermetallic phase formed after an anneal is restricted to the portion beneath the barrier layer so that Galvano-corrosion of the electrode structure is avoided.

Electro-acoustic resonator and method of forming thereof

A method and a measurement system are disclosed for the noninvasive determination of properties of an object to be examined and to the use of a contrast medium for X-ray phase-contrast measurement. in at least one embodiment of the invention, a mixture (suspension) consisting of a base liquid and a multiplicity of particles contained therein is used, the refractive index of the base liquid being different to the refractive index of the particles.

Measurement system and method for the noninvasive determination of properties of an object to be examined and contrast medium X-ray phase-contrast measurement

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Munich, Germany

Matthias Honal