Carl-zeiss-smt Ag

Carl Zeiss Sports Optics Gmbh

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Hensoldt Ag

Siemens Aktiengesellschaft

Siemens Healthineers Ag

Matthias Heller

Frank Volkmann

Hans-Jochen Paul

Christoph Zaczek

Sven Kerschbaum

Harry Bauer

Jens Ullmann

Patrick Scheible

Armin Schlierbach

Volker Claudi

Frank Michel

Gerd Polzer

Gean Jack Hsu

Johannes Pauli

Werner Kress

Matthias Kuhn

Stefan Weissenrieder

Marie Mecking

Johan Tondeur

Gard Polzer

An aiming telescope has an optical axis and a line of sight. Turrets are provided for adjusting the direction of the line of sight. A range finder is structurally connected with the aiming telescope. The range finder has a light source for emitting an emitted measuring beam. The emitted measuring beam runs outside the aiming telescope. It has a direction coinciding essentially with the direction of the line of sight. A transmission is provided for automatically adjusting the direction of the emitted measuring beam when the direction of the line of sight is adjusted. The light source is pivotably mounted on the aiming telescope. The transmission acts between the aiming telescope and the light source.

Aiming telescope having a range finder

An optical observation instrument has a device () for protecting against incoming flare () arranged within the beam path of the instrument. The device contains a filter () tuned to the flare (). The filter () is configured and arranged within the beam path such that the flare () transits the filter () at least two times.

Optical observation instrument having a device for protecting against incoming flare

A substrate-coating system and an associated substrate-heating method, wherein the substrate-coating system is equipped with a substrate holder () for holding at least one substrate at a coating position where it is coated on a coating side, and with a substrate heater (). The method includes heating at least one substrate that has been brought into such a system while it is being coated. The substrate heater includes a backside heater () for actively heating the substrate from its backside, i.e., that side opposite the side to be coated, while it is at its coating position. A heat-conducting element that is brought into thermal contact with a surface of the substrate may also be provided. Heater power is then regulated, based on the difference between the actual substrate temperature and a preset, desired, substrate temperature, and thereby limited such that the temperature of the heat-conducting element will not excessively increase over that of the substrate. The system and method are particularly applicable, e.g., to coating optical components fabricated from CaF.

Substrate-coating system and an associated substrate-heating method

An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Optical component and coating system for coating substrates for optical components

A method for coating substrates () for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Method and coating system for coating substrates for optical components

An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm, in particular approx. 248 nm, and for a high angle of incidence up to at least approx. 40&deg; has a substrate and a multilayer antireflection system arranged on at least one surface of said substrate to provide reflection reduction. The multilayer system distinguishes itself in that the layer adjacent to the substrate does not consist of magnesium fluoride and that none of the layers has a thickness of more than half of the working wavelength. In particular, the layer thicknesses of the low refractive materials should not exceed &frac13; the working wavelength. By adhering to these boundary conditions, antireflective coatings can be produced that provide both permanent laser resistance as well as a high resistance against inner layer stress and thermal stress.

Antireflection coating for ultraviolet light

A method for fabricating a geometric beamsplitter involves applying a reflective coating having at least one metallic layer to a transparent substrate. A pattern of holes containing numerous holes that are preferably randomly distributed over its reflective surface is created in the reflective coating using laser processing. The method allows inexpensively fabricating beamsplitters that have accurately defined transmittances. Beamsplitters in accordance with the invention are suitable for use as dosimetry mirrors on, for example, the illumination systems of microlithographic projection exposure systems.

Geometric beamsplitter and method for its fabrication

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Hohenahr, Germany

Matthias Heller