Nice Solar Energy Gmbh

Matthias Gang

Michael Schafer

Ralf Sorgenfrei

Georg Voorwinden

Michael Pisch

Jens Schuster

A measuring assembly and method for layer thickness measurement of a layer applied to a substrate by means of a vapor deposition method includes a measuring head which is provided with at least one vibration plate, an extraction line which can be coupled in a gas-conducting or vapor-conducting manner with a first end having a vacuum chamber for the vapor deposition method and which can be coupled in a gas-conducting or vapor-conducting manner with an opposite second end having the measuring head, wherein the extraction line includes at least one heating section or at least one cooling section.

Growing community of inventors

Munich, Georgia

Matthias Gang