Robert Boschgmbh

Matthias Fuertsch

Heribert Weber

Frank Fischer

Christoph Schelling

Stefan Pinter

Lars Metzger

Frieder Sundermeier

Hubert Benzel

Joerg Muchow

Michael Offenberg

Hans Hecht

Tjalf Pirk

Heiko Stahl

Ulrich Wagner

Lutz Mueller

Andreas Duell

Winfried Bernhard

Stefan Finkbeiner

Andreas Stratmann

Rainer Schink

Gerd Lorenz

Detlef Gruen

Roland Müller-Fiedler

Dagmar Stolpmann

A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.

Micropump having a pump diaphragm and a polysilicon layer

A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.

Membrane sensor

A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.

Micromechanical structural element having a diaphragm and method for producing such a structural element

In a mass flow sensor having a layered structure on the upper side of a silicon substrate (), and having at least one heating element () patterned out of a conductive layer in the layered structure, thermal insulation between the heating element () and the silicon substrate () is achieved by way of a silicon dioxide block () which is produced beneath the heating element () either in the layered structure on the silicon substrate () or in the upper side of the silicon substrate (). As a result, the sensor can be manufactured by surface micromechanics, i.e. without wafer back-side processes.

Micromechanical mass flow sensor and method for the production thereof

A device for detecting a deformation of a component, for example, in the automotive industry, having a deformable hollow body arrangement assigned as a deformation indicator to the component and having at least one orifice area, and at least one sensor device situated in the particular orifice area for measuring an air flow corresponding to the deformation of the hollow body arrangement. In addition, a method of detecting such a deformation of a component and activating an appropriate safety application is described. The measured data is analyzed by an analyzer unit after measurement of the deformation, and a suitable safety application optionally being activated if the measured data of the at least one sensor device indicates a deformation of hollow body arrangement and thus of the component.

Device for detecting a deformation of a component

A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor and to increase the thermal conductivity of a membrane having a greater mechanical stability, in particular the membrane has at least one dielectric or nonconducting adjustment layer with a thermal conductivity which is greater than that of a silicon oxide layer of the same thickness, the adjustment layer being used to adjust the thermal conductivity of the membrane. One of the preferred adjustment layers is polycrystalline silicon.

Mass flow sensor

A method for fabricating micromechanical components, which provides for depositing one or a plurality of sacrificial layers on a silicon substrate and, thereon, a silicon layer. In subsequent method steps, a structure is patterned out of the silicon layer, and the sacrificial layer is removed, at least under one section of the structure. The silicon layer is doped by an implantation process.

Method for fabricating micromechanical components

Growing community of inventors

Gomaringen, Germany

Matthias Fuertsch