Qorvo Us, Inc.

Qorvo Biotechnologies, LLC

Matthew Ryder

Rio Rivas

Thayne L Edwards

John Belsick

Florian Gene Bell

Rick Morton

Bruce Murdock

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

Acoustic resonator device with controlled placement of functionalization material

A cartridge for sample handling and sensing includes (i) a sample port; (ii) a first fluid port connected to the sample reservoir in the distal region via a first fluid channel; and (iii) a second fluid port connected to the sample reservoir via a second fluid channel. The cartridge includes (i) a sensor platform comprising a bulk acoustic wave (BAW) resonator and a fluid flow path comprising a sensing region extending across a sensing surface of the BAW resonator; and (ii) a fluid valve between the sample reservoir and the sensing region. A sample may be applied to the sample port; first volume of fluid may be injected through the first fluid port; and then a second volume of fluid may be injected through the second fluid port to drive the sample into the sensing region of the fluid flow path.

Cartridges for integrated BAW biosensors and methods for using the same

A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or other noble metal, or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding or non-specific binding) material. The interface layer and/or an overlying blocking material layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

Acoustic resonator devices and methods providing patterned functionalization areas

A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with a low water permeability hermeticity layer and an interface layer including a material (e.g., gold or a hydroxylated oxide surface) suitable for receiving a self-assembled monolayer (SAM) that may be functionalized with a functionalization (e.g., specific binding) material, with the foregoing layers being designed to have insubstantial impact on sensor performance. Atomic layer deposition may be used for deposition of the hermeticity and/or interface layers. The hermeticity layer protects the electrode material from attack in corrosive liquid environments, and the interface layer facilitates proper chemical binding of the SAM. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization

A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding) material. The interface layer and/or an overlying blocking layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

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Bend, OR, United States of America

Matthew Ryder