International Business Machines Corporation

Matthew Peter Sagianis

Devendra K Sadana

Hiroyuki Miyazoe

Henry K Utomo

John C Collins

John M Papalia

Luxherta Buzi

A method of fabricating a resistive semiconductor memory structure that provides in-situ selective etch of phase change materials during deposition of dielectric at low temperature (in the same chamber). The method provides, to a single processing chamber, a semiconductor wafer including a trimmed resistive memory device structure having one or more layers of phase change material used to form a resistive memory device. The one or more layers of phase change material have oxidized sidewall surfaces as a result of a prior etching step where a whole stack structure of the layers forming the resistive memory structure is etched. Then, an encapsulating of the trimmed resistive memory device structure is performed by depositing, within the processing chamber, using a PECVD, a layer of dielectric material, and during the encapsulating, etching, within the processing chamber, the wafer to selectively remove the phase change material oxidation at the sidewall surfaces.

In-situ low temperature dielectric deposition and selective trim of phase change materials

An energy storage device has all components, e.g. anode, electrolyte, and cathode contained and sealed with a trench in a substrate. Various methods and structures are disclosed for sealing the components. In some embodiments, a sealer or sealing layer seals the components. One embodiment uses a tension clamp to contain the components with additional pressure. Another embodiment uses a cathode structure cup which is held in place in the substrate via sidewall trench features. Different external connections to the device are disclosed. The invention enables full three-dimensional components to be created and contained entirely within the substrate during assembly, curing, galvanic cycling and other manufacturing processes and provides improved sealing of the components during device operation.

Encapsulating in-situ energy storage device with cathode contact

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Bayside, NY, United States of America

Matthew Peter Sagianis