Kla Tencor Corporation

Carbon, Inc.

Kla Corporation

Matthew Panzer

Ilya Bezel

Anatoly Shchemelinin

Eugene Shifrin

Anant Chimmalgi

John R Tumbleston

Lauren Wilson

Jason P Rolland

Bob E Feller

Kenneth P Gross

Matthew Derstine

Kyle Laaker

Rudolf C Brunner

Rajeev Patil

Courtney F Converse

Jincheng Wang

Oshin Nazarian

Ariel Herrmann

Wei Zhao

Joshua Wittenberg

Tabor Baranti

Various embodiments described herein provide a method of making an object from a three-dimensional geometry file and a light polymerizable resin on a light-transmissive window by projection of light through the window in a bottom-up stereolithography process. The method may comprise: slicing the file into a series of sequential images. Temperature fluctuations in the resin may be calculated for at least some of the sequential images upon light polymerization thereof based on sequential exposure of the resin to light, the light corresponding to the series of sequential images. During producing of the object, the production may be modified based on the calculated temperature fluctuations by: (i) reducing production speed during at least a portion of the production; (ii) activating a window cooler during at least a portion of the production; or (iii) increasing production speed during at least a portion of the production.

Additive manufacturing method including thermal modeling and control

A test cell useful for determining the photosensitivity of a photopolymerizable material, includes a support plate having a top surface portion, a bottom surface portion, and an opening extending therebetween, a light-transmissive base member removably or permanently connected to said bottom surface portion to form with said opening a well, into which well photopolymerizable material can be deposited, and a sensor comprising a thermal sensor, strain sensor, or combination thereof operatively associated with said light-transmissive base member.

Apparatus for determining the photosensitivity of a stereolithography resin

A method of making a physical object having a desired geometry from a resin such as a dual cure resin by an additive manufacturing process such as a dual cure additive manufacturing process includes (a) entering into a processor a first input geometry for the physical object, the first input geometry corresponding to a desired geometry for the physical object; (b) modifying in the processor the first input geometry to a candidate inversely distorted input geometry for the physical object; (c) generating a simulated object from the candidate inversely distorted input geometry with a Multiphysics model simulation of the additive manufacturing process, the simulated object including distortions towards the desired geometry arising from the additive manufacturing process; (d) evaluating whether the simulated object sufficiently corresponds to the desired geometry for the physical object.

Mutliphysics model for inverse warping of data file in preparation for additive manufacturing

A method of making a three-dimensional object by additive manufacturing from a blended resin including (i) at least one light polymerizable first component and, (ii) at least one, or a plurality of, second solidifiable components that are different from said first component, the method including: providing a first resin and a second resin, where the resins produce three-dimensional objects having different mechanical properties from one another when all are produced under the same process conditions; mixing the first and second resins with one another to produce the blended resin, the blended resin producing a three-dimensional object having mechanical properties intermediate between that of objects produced by the first and second resins when all are produced under the same process conditions; and dispensing the blended resin to the build region of an additive manufacturing apparatus; and then optionally but preferably producing a three-dimensional object from the blended resin in the apparatus.

Resin dispenser for additive manufacturing

A method of making a three-dimensional object by additive manufacturing from a blended resin (e.g., a blended dual cure resin), the blended resin including (i) at least one light polymerizable first component and, (ii) optionally but preferably, at least one, or a plurality of, second solidifiable components that are different from said first component, the method including one or more of the steps of: (a) providing a first resin and a second resin, where the resins produce three-dimensional objects having different mechanical properties from one another when all are produced under the same process conditions; (b) mixing the first and second resins with one another to produce the blended resin, the blended resin producing a three-dimensional object having mechanical properties intermediate between that of objects produced by the first and second resins when all are produced under the same process conditions; and (c) dispensing the blended resin to the build region of an additive manufacturing apparatus; and then (d) optionally but preferably producing a three-dimensional object from the blended resin in the apparatus.

An apparatus useful for rapidly producing at least one object having a contoured surface portion from a light-polymerizable resin is provided. The apparatus includes (a) a window containing an inhibitor of polymerization, on which window a coating of light polymerizable resin can be placed, with the inhibitor of polymerization forming a first dead zone of unpolymerizable resin in the light polymerizable resin; (b) a polymerizing light source operatively associated with the window and positioned for projecting polymerizing light through the window; (c) a controller operatively associated with said light source and configured to pattern and project said polymerizing light at a first light dosage sufficient to form the object in the resin under stationary conditions, while spatially modulating the first light dosage so that the first dead zone is spatially contoured in thickness, to produce a first contoured surface portion on each object, which first contoured surface portion is in contact with the first dead zone of unpolymerizable resin.

Static liquid interface production of lenses and other contoured objects

A method of forming a three-dimensional object can be carried out by: (a) providing a carrier and an optically transparent member having a build surface, the carrier and the build surface defining a build region therebetween; (b) filling the build region with a polymerizable liquid, the polymerizable liquid comprising: (i) a polymerizable component; (ii) upconverting particles that are excited by light at a first wavelength and upon excitation emit light at a second wavelength that is shorter than the first wavelength; and (iii) a photoiniator that catalyzes polymerization of the polymerizable component upon excitation by light at the second wavelength; (c) irradiating the build region through the optically transparent member with an excitation light at the first wavelength, and optionally but in some embodiments preferably also advancing the carrier away from the build surface, wherein the excitation light is temporally and/or spatially modulated, to thereby form the three-dimensional object from the polymerizable liquid.

Continuous liquid interface production with upconversion photopolymerization

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.

System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter

A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Broadband light source including transparent portion with high hydroxide content

A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

System and method for separation of pump light and collected light in a laser pumped light source

An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

Continuous-wave laser-sustained plasma illumination source

A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.

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San Jose, CA, United States of America

Matthew Panzer