USA As Represented by Secretary of the Navy

Matthew P Ray

Jeffrey W Baldwin

Bradford B Pate

A device comprising a single crystal diamond substrate with a buried electrically conducting layer with &#x3bc;m square openings spaced apart milled into the diamond by ablating the carbon above wherein the step of ablating uses a diode pumped tripled Nd:YAG laser at 355 nm and wherein the square openings have electrical contacts and wherein the resistance measured between the square openings is dominated by the buried electrically conducting layer and on the order of about 1 k&#x3a9;.

Device with a single crystal diamond substrate with a buried electrically conducting layer

A method of laser ablation for electrical contact to a buried electrically conducting layer in diamond comprising polishing a single crystal diamond substrate having a first carbon surface, implanting the diamond with a beam of 180 KeV followed by 150 KeV Cions at fluencies of 4&#xd7;10ions/cmand 5&#xd7;10ions/cmrespectively, forming an electrically conducting carbon layer beneath the first carbon surface, and ablating the single crystal diamond which lies between the electrically conducting layer and the first carbon surface.

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Bridal Trail, SC, United States of America

Matthew P Ray