Alfred University

Kyocera Corporation

Conax Technologies LLC

Matthew M Hall

Tatsuji Furuse

Alexis G Clare

Scott Michael Kroon

William Sean Halligan

Lana Margaret Placek

Michael Edward Ferraro

Timothy Keenan

Disclosed are barrier coatings for fused silica components used in semiconductor processing. In particular, the present disclosure concerns protective substrate-barrier coatings composed of corrosion-resilient metal compounds which provide superior resistance to erosion/corrosion when a coated substrate is subjected to the acidic environments at elevated temperatures typical for semiconductor processing.

Erosion / corrosion resistant barrier coating

An optical glass consisting essentially of BOin an amount of 10-40 wt %, SiOin an amount less than or equal to 5 wt %, ZnO in an amount less than or equal to 15 wt %, SrO in an amount less than or equal to 9 wt %, ZrOin an amount less than or equal to 9 wt %, LaOin an amount of 15 to 45 wt %, BaFin an amount of 1 to 10 wt %, BaO in an amount less than or equal to 5 wt %, HfOin an amount of 0.1 to 7.5 wt %, GdOin an amount less than or equal to 16 wt %, CaO in an amount less than or equal to 7 wt %, ZrFin an amount less than or equal to 5 wt %, NaO in an amount less than or equal to 2 wt % and YOin an amount less than or equal to 16 wt %. The optical glass has a glass transition temperature in a range of 500-670&#xb0; C. and a refractive index (nd) in a range of 1.60 to 2.00.

Optical glass

Growing community of inventors

Mendon, NY, United States of America

Matthew M Hall