Oxford Instruments Afm Inc

Veeco Instruments Inc.

Oxford Instruments, Inc.

Asylum Research Corporation

Oxford Instruments Asylum Research Inc

Matthew Klonowski

Jason Paul Cleveland

Roger B Proksch

Dan Bocek

Matthew Longmire

Rohit Jain

Maarten Rutgers

Mario Viani

Jason Osborne

James A Hodgson

Anil Gannepalli

Roger Carlos Proksch

Daren Walters

Jonathan Hensel

Paul Costales

David A Kneeburg

Wei Yao

Ingo Schmitz

A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

Integrated micro actuator and LVDT for high precision position measurements

Integrated micro actuator and IVDT for high precision position measurements

A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument. All these modules and many of their subassemblies are replaceable and potentially upgradeable. This allows updating to new technology as it becomes available.

Modular atomic force microscope

The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features of a sample. This is accomplished by selecting a step distance between adjacent lines of the survey scan that does not equal the pitch of the features in a direction orthogonal to the direction the survey scan traverses, i.e., does not equal the pitch of the features in the scan direction, X. The aspect ratio of the scans can also be modified to further improve sample throughput.

Scanning probe microscopy method and apparatus utilizing sample pitch

Growing community of inventors

Santa Barbara, CA, United States of America

Matthew Klonowski