Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Matthew John Bosco

Eugene Joseph Karwacki, Jr

Andrew David Johnson

David Charles Winchester

Timothy Christopher Golden

Jeffrey Raymond Hufton

Thomas Stephen Farris

Douglas Paul Dee

Richard Linton Samsal

Richard Vincent Pearce

Gerald W Klein

Isaac Patrick West

Jr Eugene Joseph Karwacki

Issac Patrick West

An apparatus and process for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon, from the effluent of a chemical process reactor that utilizes such gases alone or in a gas mixture or in a molecule that becomes decomposed wherein the chemical process reactor uses a sequence of different gas composition not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.

Method and equipment for selectively collecting process effluent

The present invention discloses the improvements to a vacuum swing adsorption (VSA) process used for Xe recovery. By only collecting the recovered gas mixture after the initial evacuation of Nfrom the adsorbent vessel and void space, the recovered Xe is not diluted by Ncontained in the adsorbent vessel and void space. The concentration of the recovered Xe can by increased (high purity), simultaneously little Xenon is lost. During the initial evacuation of N, the vessel has been evacuated to a pressure less than 1 atmospheric pressure, for example, from 100 to 1 torr.

Recovering of xenon by adsorption process

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Breinigsville, PA, United States of America

Matthew John Bosco