Silicon Valley Group, Inc.

Matthew J Van Doren

Don Roy Sauer

Alexander H Slocum

Alexander I Gurary

Sandeep Krishnan

Bojan Mitrovic

Chenghung Paul Chang

Johann Tam

Ian Kunsch

Rodney Scott Ziegenhagen, Ii

Aniruddha Bagchi

David Pap Rocki

Larry Gerszewski

Multi-filament heater assembly

A modular system and a method of creating a modular system comprising a substantially rigid frame and a plurality of modules mounted at predetermined locations on the frame by means of kinematic couplings. The frame includes a main beam in the form of a spine, and a plurality of transversely extending bulkheads. The method includes creating a model of the system using rigid bodies and thereafter providing the frame and modules and securing them kinematically. The kinematic couplings comprise three pairs of aligning elements, each in the form of a male element and a contact element. The contact elements may take the form of grooves, tetrahedral depressions, or flat surfaces.

Modular system

A multi-stage telescoping tube structure and a robot including a multi-stage telescoping tube structure. The multi-stage telescoping tube structure includes an outer tube, an intermediate tube, and an inner tube. The intermediate tube is slidably received in the outer tube, and the inner tube is slidably received in the intermediate tube. It further includes a multi-stage screw for arrangement translating rotary motion into linear movement of the tubes, and a drive means coupled to the screw arrangement. The robot further includes a support bracket, rotatably supporting the multi-stage telescoping tube structure, and an electric motor for rotating the arrangement. The structure further includes rail guides engagable with complimentary horizontally extending rails for horizontal movement of the robot.

Multi-stage telescoping structure

A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.

Wafer gripper

Growing community of inventors

Pleasanton, CA, United States of America

Matthew J Van Doren