Kla Corporation

Matthew Hoffman

Gildardo Rios Delgado

Rudy Flores Garcia

Zefram Marks

Joseph Walsh

An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

Growing community of inventors

Milpitas, CA, United States of America

Matthew Hoffman