Nikon Corporation

Nikon Research Corporation of America

Matthew D Rosa

Jonathan Kyle Wells

Michael B Binnard

Daniel Gene Smith

Paul Derek Coon

Stephen P Renwick

Steven Douglas Slonaker

Michel Pharand

Johnathan Marquez

Patrick S Chang

Brett William Herr

Pedro Reynoso-Mora

A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

High-resolution position encoder with image sensor and encoded target pattern

An actuator assembly () for moving a device () includes a stator component (), a mover component (), a measurement system (), and a signal processor (). The measurement system () includes (i) a magnet assembly () that is coupled to and moves with the mover component (); and (ii) a plurality of spaced apart sensors (A). The magnet assembly () produces a magnetic field (B) that moves relative to the stator component () as the mover component () moves along a mover axis (C). Each sensor (A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (B) from the magnet assembly () as the mover component () is moved relative to the sensors (A). The signal processor () receives the sensor signals and estimates a position of the mover component () along the mover axis (C) based at least in part on the sensor signals.

Actuator assembly including magnetic sensor system for vibrationless position feedback

Growing community of inventors

Tokyo, Japan

Matthew D Rosa