Intel Corporation

Matthew C Zeman

Jaime A Sanchez

Alexander I Mamchik

Sachin Gupta

Disclosed herein is a high-performance thermal chuck for enhanced thermal management of high-power integrated circuit (IC) devices. The disclosed high-performance thermal chuck provides active heating and cooling for post-manufacture device testing. A high-performance heatsink comprises microfluidic channels in a high thermal conductivity silicon carbide (SiC) body for providing enhanced active cooling of an IC device. A refractory heating element is embedded between an integrated heat spreader comprising diamond and the heatsink for providing active heating. The integrated heat spreader is bonded to the heatsink. Closely matched coefficients of thermal expansion between the diamond heat spreader and the heatsink mitigate thermally-induced warpage.

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Portland, OR, United States of America

Matthew C Zeman