Canon Kabushiki Kaisha

Matthew C Traub

Whitney Longsine

Van Nguyen Truskett

Steven C Shackleton

Colleen Lyons

Logan L Simpson

Tom H Rafferty

Yeshwanth Srinivasan

Steven Wayne Burns

Brent Andrew Snyder

Tyler Pearce Mann

Antoine Dellinger

Roger R Wenzel

Adam Shackleton

A fluid dispensing system, an imprint lithography system with a fluid dispensing system, a method of manufacturing an article with the fluid dispensing system. The fluid dispensing system comprising: a fluid dispenser and a heater. The fluid dispenser configured to dispense droplets of a fluid onto a substrate. The heater configured to maintain droplet temperature at greater than 23° C. Each of the droplets has a fluid volume that is less than 1.2 pL. The fluid dispenser is configured to have a drop placement accuracy for the imprint resist fluid that is less than a first threshold when the droplet fluid temperature is greater than 23° C. The drop placement accuracy is greater than the first threshold when the droplet fluid temperature is less than or equal to 23° C.

System and method for controlling the placement of fluid resist droplets

A performance monitor determines a performance characteristic of a plurality of dispensers receiving fluid from a reservoir. Each of the plurality of dispensers has an actuator that, when actuated, causes the each of the dispensers to generate a droplet of the fluid. A driver generates a drive command to the actuator to adjust a physical attribute of the droplet based on the performance characteristic to satisfy a performance criteria.

Method and apparatus to reduce variation of physical attribute of droplets using performance characteristic of dispensers

A fluid dispensing system, an imprint lithography system with a fluid dispensing system, a method of manufacturing an article with the fluid dispensing system. The fluid dispensing system comprising: a fluid dispenser and a heater. The fluid dispenser configured to dispense droplets of a fluid onto a substrate. The heater configured to maintain droplet temperature at greater than 23&#xb0; C. Each of the droplets has a fluid volume that is less than 1.2 pL. The fluid dispenser is configured to have a drop placement accuracy for the imprint resist fluid that is less than a first threshold when the droplet fluid temperature is greater than 23&#xb0; C. The drop placement accuracy is greater than the first threshold when the droplet fluid temperature is less than or equal to 23&#xb0; C.

Methods and systems for dispensing fluid in imprint lithography, including selecting drop patterns, each associated with different target locations on a substrate and a selected volume for each drop of each drop pattern; selecting a plurality of subsets of nozzles of a dispenser, each subset configured to dispense drops corresponding to each drop pattern; for each drop pattern: dispensing the drops corresponding to the drop pattern from each subset of nozzles; obtaining an image of the drops from each subset of nozzles; and processing the image from each subset of nozzles to determine a positional error of the drops with respect to the target locations and a volumetric error of the drops with respect to the selected volume for each drop; and adjusting, based on the positional error and the volumetric error of the drops from each subset of nozzles for each drop pattern, dispense parameters of the dispenser.

Drop placement evaluation

An apparatus and method for a dispenser with nozzles configured to eject lines of droplets of formable material onto a substrate in response to ejection signals. The fluid dispenser dispenses a first line of ejected droplets of formable material onto a first location on the substrate. A line camera generates camera signals that are representative of the first line of ejected droplets. The camera signals are analyzed to identify malfunctioning nozzles. The fluid dispenser dispenses a second line of ejected droplets of formable material onto a second location on the substrate that compensates for the one or more malfunctioning nozzles.

Systems and methods for detection of and compensation for malfunctioning droplet dispensing nozzles

A photo-patterned fluorocarbon monolayer directly grafted to Si surface atoms provides anti-wetting performance at controlled locations, wherein the Si surface oxide is etched and reacted with fluorocarbon chains with a terminal C&#x2014;C double bond, resulting in Si&#x2014;C surface. As the direct Si&#x2014;C linkages are chemically robust, and much more resistant to decomposition than Si&#x2014;O&#x2014;C bonds, the resulting surface does not suffer from the shortcomings of current MEMS dispensers.

Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same

A fluid dispenser calibration system includes a fluid dispenser having a plurality of nozzles, a balance having a balance surface, and a mask positioned between the fluid dispenser and the balance surface. A nozzle pitch is a distance between two adjacent nozzles. The balance measures mass of fluid dispensed from a single nozzle and measures a change in mass on the balance surface. The balance surface has a linear dimension that is greater than the nozzle pitch. The mask includes an aperture and a catch region. The aperture allows fluid dispensed from the single nozzle to impact the balance surface. The catch region catches fluid dispensed from remaining nozzles in the plurality of nozzles.

Masked quartz crystal microbalance for calibrating and monitoring inkjet dispensers

A cap, a method of using a cap, and a system for using the cap. The cap is capable of being fitted to a bottle. The cap includes a transfer port; and a vent port. The vent port includes a membrane and a valve.

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Austin, TX, United States of America

Matthew C Traub