Semitool, Inc.

Matthew C Egloff

Daniel J Woodruff

James J Erickson

Thomas H Oberlitner

Steve L Eudy

David P Mattson

Randy Harris

Jeffry Alan Davis

Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly. The cleaning electrode may be disposed along a position of the motion path that is beyond the range of motion required to process the microelectronic workpiece so that the programmable controller may be programmed to conduct a cleaning cycle while a microelectronic workpiece is present in the reactor for processing.

Processing apparatus including a reactor for electrochemically etching microelectronic workpiece

An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces

Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems

Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece

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Butte-Silver Bow, MT, United States of America

Matthew C Egloff