Advanced Technology Materials, Inc.

Entegris, Inc.

Matthew B Donatucci

W Karl Olander

Luping Wang

Michael J Wodjenski

Joseph D Sweeney

Edward A Sturm

Joseph Robert Despres

Edward Edmiston Jones

Barry Lewis Chambers

Chiranjeevi Pydi

Gregory Scott Baumgart

Karl W Olander

A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.

Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels

Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

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Bethel, CT, United States of America

Matthew B Donatucci