University of California

Leland Stanford Junior University

Matthew A Hopcroft

Gilbert Allan Hawkins

Michael Alan Marcus

Thomas W Kenny

Albert P Pisano

Rajesh Vinodrai Mehta

Bongsang Kim

Saurabh Chandorkar

Manu Agarwal

Renata Melamud

Ya-Mei Chen

Michael Stephen Sheppy

Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.

Piezoelectric actuators

Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

Composite mechanical transducers and approaches therefor

Growing community of inventors

San Francisco, CA, United States of America

Matthew A Hopcroft