Bae Systems Information and Electronic Systems Integration Inc.

Matthew A Gregory

Andrew T S Pomerene

Thomas J McIntyre

Scott C Willis

Kenneth R Knowles

Richard Brosh

Charles N Alcorn

A method for polishing photonic chips is described. A gauge is placed in a photonic chip adjacent to an edge to be polished. The gauge includes a set of bars of various lengths. The bar lengths can be progressively ordered from shortest to longest or vice versa. The photonic chip is then secured in a chip polishing jig to get ready for polishing. When the photonic chip is being polished, an operator can visually inspect the gauge by looking at the polishing edge to estimate a polishing depth in order to determine a stopping point for polishing. Once the stopping point has been reached, the polishing of the photonic chip can be stopped.

Method for polishing photonic chips

A method for verifying stitching accuracy of a stitched chip on a wafer is disclosed. Initially, a set of test structures are inserted within a reticle layout. An exposure program is executed to control a photolithography equipment having a stepper to perform multiple exposures of the reticle on a wafer to generate a stitched chip on the wafer. Electrical measurements are then performed on the test structures at actual stitch boundaries of the stitched chip to evaluate stitching accuracy of the stitched chip.

Method and apparatus for verifying stitching accuracy of stitched chips on a wafer

A digital adaptive power supply interface has two feedback loops, each including a VCO, to automatically compensate for temperature and semiconductor process variations. A first loop compares the system input phase/frequency to a reference voltage that has been converted to a first digital frequency signal by a VCO in the first loop, and generates an analog difference signal. The second loop compares this analog difference with the power supply output voltage, and a VCO in this second loop converts result of this comparison to a second digital frequency signal. The digital frequency signals of the two loops are fed respectively to two registers and the content of the registers are subtracted, one from the other, to generate a digital error signal adjust the power supply output voltage to the input frequency.

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Woodbridge, VA, United States of America

Matthew A Gregory